Shutdown lampoly SNF 2012-05-18 12:17:16: Alarm Wafer not sensed at exit cassette

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri May 18 14:02:27 PDT 2012


The wafer broke inside the chamber, vented chamber and vacuum
preces of broken wafer. Chcecked wafer handoff from chamber to
unload arm to reciever cassette.




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