LAMpoly - update on particles, Friday 04/20

[Len Booth]

LAMpoly users -
	Here's the latest info provided by Brian Greene;
He has been inspecting wafers using the UV lamp:
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My update on the particle generation in lampoly:

  Inspecting my wafers before seasoning -> 2 particles or less per wafer
  Inspecting my wafers after seasoning -> 8 particles or less per wafer

  It didn't seem to be getting any better or worse with the number of
wafers run through the system.  I ran 15 seasoning wafers, and 1
polysilicon wafer.

-Brian