CF4 and SF6

Jim McVittie mcvittie at cis.Stanford.EDU
Fri Mar 16 14:18:17 PST 2001

Lam users,

We are starting to have a particle problem in the Lam. The solution is to
start doing plasma chamber cleans on a regular basis. Right now the
problem in doing plasma cleans is that the SF6 and C2F6 share the same
flow meter. This means that the SF6/C2F6 line has to be pumped out before
and after each chamber clean. One solution is to move the SF6 over to the
CF4 since I am not aware of anyone currently using CF4 in the Lam. This
would mean that to use CF4 one would have to pump out the SF6 from the
SF6/CF4 line. Please contact me if you need to use CF4 on the Lam.

James P. McVittie	                Senior Research Scientist
Allen Center for Integrated Systems     jmcvittie at
Stanford University             	Tel: (650) 725-3640	
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075	

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