New Log Sheet, RF Time, Wafer Count

Jim McVittie mcvittie at cis.Stanford.EDU
Thu Mar 29 20:46:57 PST 2001


Lampolu User,

I have put together a new log sheet for the Lam. There is now space for 2
users per page and spaces for RF time-on and total wafer count. Because of
the recent particle problem, I want users to keep track of the RF time-on
and wafers run between plasma cleans. The RF time-on and wafer count can
be found on the top right side of the page for menu item #9.  So far I
have been doing the plasma cleans. Once I have everything worked out, I
will send a note out explaining how to do a plasma clean if the rf time on
has exceeded something like 100 min.

			Jim 	
--------------------------------------------------------------
James P. McVittie	                Senior Research Scientist
Allen Center for Integrated Systems     jmcvittie at stanford.edu
Stanford University             	Tel: (650) 725-3640	
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075	




More information about the lampoly mailing list