From cbaxter at snf.stanford.edu  Tue Feb 12 18:49:38 2002
From: cbaxter at snf.stanford.edu (Cesar Baxter)
Date: Tue, 12 Feb 2002 18:49:38 -0800
Subject: Wet clean
Message-ID: <3C69D442.C975E863@snf.stanford.edu>



To All Users,


Its been a while since the last chamber wet clean has been done on
the chamber. Lately some users are complaining that particulates have
been
appearing on their wafers. I booked the tool for tomorrow starting @4pm
to perform wet on the chamber.



Cesar