From beckwith at snf.stanford.edu Wed Jan 16 10:20:45 2002 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 16 Jan 2002 10:20:45 -0800 Subject: Fwd: Shutdown lampoly 2002-01-16 10:10:52: won't pumpdown Message-ID: >Delivered-To: beckwith at snf.stanford.edu >Mailing-List: contact lampoly-pcs-help at snf.stanford.edu; run by ezmlm >X-No-Archive: yes >List-Post: >List-Help: >List-Unsubscribe: >List-Subscribe: >Delivered-To: mailing list lampoly-pcs at snf.stanford.edu >Subject: Shutdown lampoly 2002-01-16 10:10:52: won't pumpdown >Date: Jan 16, 2002 10:10:53 AM >From: evelyn at snf.stanford.edu >To: lampoly-pcs at snf.stanford.edu > >alarm #40....entry loadlock won't pump to crossover Just as an addendum. This has happened at least twice that I know of. If this happens to you, please shut down the machine and disable it. If you do not shutdown and disable, the wafer stuck on the flat finder may end up in the etch chamber. The machine randomly, does pump down the load lock and all of a sudden the wafer gets loaded into the machine and starts etching. When you put the machine in shutdown the etch gasses cannot flow so even if the wafer ends up in the chamber the etch process won't start.