From booth at snf.stanford.edu  Tue Sep 10 14:39:17 2002
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 10 Sep 2002 14:39:17 -0700
Subject: LAMpoly status Sept 10,2002
Message-ID: <3D7E6685.195CA980@snf.stanford.edu>

A new hard disk & disk controller have been installed
& checked to verify that the machine will indeed boot
up.  I'm scheduled to pick up a new floppy drive
tomorrow morning & install that.  If everything is
working, I should be able to install the old recipes
onto the new hard drive, & test to make sure the
recipes run as before.  The etch chamber will be wet
cleaned, since it has been turned off for a while.
So we should be running normally by Thursday.
			Len


From booth at snf.stanford.edu  Fri Sep 13 07:11:25 2002
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 13 Sep 2002 07:11:25 -0700
Subject: LAMpoly status Sept 13, 2002
Message-ID: <3D81F20D.D1F326BB@snf.stanford.edu>

	The machine is available for general use again -
the shutdown has been removed.  After Cesar performed a wet clean
on the etch chamber, Henry tested a standard recipe:
"Ran a seasoning with silicon wafers, then a process recipe #1 with Poly
wafer. Uniformity is 5% across the wafer."
	A new hard disk, disk controller, and floppy drive
have been installed.  I have copied the following recipes
from the old hard disk, onto the new hard disk:

File#   Purpose                 created by
- - - - - - - - - - - - - - - - - - - - - - -
1       Std poly etch           Jim McVittie
25      aniso poly/si etch      Theresa K.
27      aniso poly etch         Hopcroft, Metzler
77      poly gate etch          Farid
91      deep e-beam align mark  Bill Price
92      poly on ox w/endpoint   Bill Price
14201   poly etch               Andrew Besso
Clean1  SF6/O2/Cl               Jim McVittie
Clean2  SF6/O2/Cl w/seasoning   Jim McVittie

	Also, I've added a recipe index page to the Logbook,
which lists the recipes above for easy reference.
			Len