From booth at snf.stanford.edu Thu May 15 12:31:49 2003 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 15 May 2003 12:31:49 -0700 Subject: LAMpoly shutdown today Message-ID: <3EC3EB25.58B03D4F@snf.stanford.edu> users - There is a wafer lost in the etch chamber. It will be cleaned up tonight, and should be available for normal use tomorrow. Len