All,
I have scheduled for the chlorine and BCl3 gas cylinder to be changed
on Wed. 8/25 @ 7:00am thru Thur. 8/26 @ 8:00am. The tools that will be
affected are the P5000etch (chambers A and C), the PQuest and the Lampoly.
Please let me know if you have a problem with this schedule.
Thank you,
Elmer