Chlorine and BCl3 gas cylinder change

Elmer Enriquez eenriquez at stanford.edu
Thu Aug 19 11:35:53 PDT 2004


All,
     I have scheduled for the chlorine and BCl3 gas cylinder to be changed
on Wed. 8/25 @ 7:00am thru Thur. 8/26 @ 8:00am.  The tools that will be
affected are the P5000etch (chambers A and C), the PQuest and the Lampoly.
Please let me know if you have a problem with this schedule.

Thank you,

Elmer




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