From latta at snf.stanford.edu Tue May 10 10:37:30 2005 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 10 May 2005 10:37:30 -0700 Subject: HBR leak- Poly etch not available. Message-ID: <4280F15A.20702@snf.stanford.edu> Folks, The HBr tank in the toxic vault developed a leak and will take some time to repair. Lampoly is not usable and on shutdown. P5000etch is in problem status- Chamber C cannot be used for the poly program, but the other Chambers are ok to use. Repair time estimate is 7-10 days. A message will go out when the processes are available to use. -Nancy From rcrane at snf.stanford.edu Fri May 13 16:18:54 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 13 May 2005 16:18:54 -0700 Subject: Status of HBr gas for poly etch Message-ID: <428535DE.8020901@snf.stanford.edu> Poly etch users, Poly etch shutdown: We should be back on-line by Tuesday afternoon, May 17. As you probably are aware, last weekend we experienced a gas leak in the HBr source cabinet. The leak was properly contained by the gas cabinet and exhaust system. The exhaust scrubber dealt with the errant gas load. The gas purge panel has been rebuilt and installed. We have a new cylinder of HBr installed and leak checked. One critical step is needed prior to turning on the gas system. The toxic gas monitor failed to properly indicate the presence of the gas in the exhaust duct. A new sensor is on order and will be replaced on Tuesday morning, 5/17. The sensor needs to be challenged with a test gas to prove proper operation before poly etch will be back in operation. This test is scheduled for Tuesday morning. Thanks for your patience, Dick From rcrane at snf.stanford.edu Tue May 17 16:02:19 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 17 May 2005 16:02:19 -0700 Subject: HBr gas status Message-ID: <428A77FB.7080508@snf.stanford.edu> Etch tool users, The HBr gas source panel and gas cylinder are ready for operation. We need to test the gas detection system prior to turn-on. The test is scheduled for tomorrow, May 18, between 1000 and 1030. Upon successful completion of the test, the tools will be ready for use. Thanks for your support, Dick From rcrane at snf.stanford.edu Wed May 18 11:36:14 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Wed, 18 May 2005 11:36:14 -0700 Subject: HBr is back on-line Message-ID: <428B8B1E.6090909@snf.stanford.edu> LamPoly and p5000 users: I am pleased to announce that the gas testing of the toxic gas detectors was successfully completed. HBr gas is now back on-line and poly etching processes are now available for use. Thanks for your patience, Dick From robinhmb at yahoo.com Wed May 18 14:56:11 2005 From: robinhmb at yahoo.com (Robin King) Date: Wed, 18 May 2005 14:56:11 -0700 (PDT) Subject: Lam is free from 3pm onward today Message-ID: <20050518215612.98657.qmail@web54704.mail.yahoo.com> Change of plans. __________________________________ Do you Yahoo!? Yahoo! Mail - Find what you need with new enhanced search. http://info.mail.yahoo.com/mail_250 From ginel at stanford.edu Fri May 20 13:34:10 2005 From: ginel at stanford.edu (Ginel Hill) Date: Fri, 20 May 2005 13:34:10 -0700 (PDT) Subject: reservation removed friday afternoon Message-ID: I am seeing crystal-oriented pitting (square-ish pits and sickle shape defects) during long Si etchs (~30 min) using Receipe 1. If anyone has any insight, or is doing a similiar etch I would be interested in your results. -Ginel