reservation removed friday afternoon

Ginel Hill ginel at stanford.edu
Fri May 20 13:34:10 PDT 2005



I am seeing crystal-oriented pitting (square-ish pits and sickle shape
defects) during long Si etchs (~30 min) using Receipe 1.  If anyone has
any insight, or is doing a similiar etch I would be interested in your
results.

-Ginel



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