lampoly running well

Raymond Woo rwoo at stanford.edu
Thu Aug 3 11:31:52 PDT 2006


For those who are interested - we ran a test on the lampoly today and it
appears to be running great.  The pressure/gas/flow/power/voltage were all
stable.  The a-Si etch rate on program 77 overetch (step 7) was exactly the
same as it was before the shutdown (~2500A/min).  We didn't get an exact
oxide etch rate, but the selectivity appears to be as good as it was
before.  The selectivity was no less than 50:1 and probably was a lot
better than that.

- Ray



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