From mtang at stanford.edu  Tue Aug  7 17:08:30 2007
From: mtang at stanford.edu (Mary Tang)
Date: Tue, 07 Aug 2007 17:08:30 -0700
Subject: Cl2 and HBr
Message-ID: <46B9097E.9050003@stanford.edu>

Hi everyone --

Just wanted to let you know that Cl2 and HBr will remain unavailable, 
perhaps for a few more days.  As you may know, there have been flow and 
pressure control problems with these gases.  Cesar is systematically 
checking each subsystem.  This will take some time.  If all is well, we 
should be back up in a couple of days (after system checking, additional 
adjustments to correct flows will require time.)  If, however, there are 
problems with any of the subsystems, the gases will be unavailable for a 
more extended time.  We will update everyone as the situation changes.

Apologies for the inconvenience.

Your SNF Staff

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From edmyers at stanford.edu  Mon Aug 13 16:04:26 2007
From: edmyers at stanford.edu (Ed Myers)
Date: Mon, 13 Aug 2007 16:04:26 -0700
Subject: Etcher and Cl status
Message-ID: <6.2.5.6.2.20070813155656.03c0df18@stanford.edu>

All,

I apologize for the delays in getting the system(s) back on 
line.  Unfortunately, we are still struggling with our chlorine gas 
delivery system.  We are pretty confident there is a leak in either 
the gas panel or a leak through from the bottle.  Not being able to 
determine the origin of the leak is what is causing the delay.  If we 
do have a leaking bottle, there is significant risk in opening the 
line.  While we understand we are delaying work, we don't want to 
cause a chlorine release (in the gas cabinet, outside of the fab and 
work area) and especially have a person exposed to this release.

Please be assured, everyday we are working on this problem.  Today we 
had a gas cabinet vendor review our panel and he made some 
suggestions.  We will be following up with his recommendations and 
are trying hard to get this resolved.

Regards,



From mtang at stanford.edu  Wed Aug 22 10:46:50 2007
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 22 Aug 2007 10:46:50 -0700
Subject: Cl2 unavailable later today
Message-ID: <46CC768A.8050001@stanford.edu>

Just to let you know.....

A new Cl2 bottle is due in today.  If it arrives as planned, maintenance 
will shut down the Cl2 line to pump out overnight in preparation for 
bottle change/panel upgrade tomorrow.  Apologies for the inconvenience.  
Please make sure to check messages and Coral for Cl2 status.

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu