From mtang at stanford.edu Fri Oct 12 17:56:10 2007 From: mtang at stanford.edu (Mary Tang) Date: Fri, 12 Oct 2007 17:56:10 -0700 Subject: Cl2 and HBr update Message-ID: <471017AA.9020602@stanford.edu> Hello everyone -- Thanks for your patience as our maintenance crew works on the gas supplies. The chlorine line repairs were completed and tested as planned on Monday. However, problems with the HBr panel were then uncovered. Since both cylinders share the same cabinet and purge system, repairs to the HBr panel prevented turn on of chlorine. Repairs of the shared system are now complete. As of today, chlorine has been turned back on for P5000etch. Nancy has tested it and it is now ready for metal etch. On Monday, chlorine will be turned back on for pquest, following a chamber clean. Depending on user demand/feedback, the monthly chlorine/fluorine chemistry cycle may be adjusted. Chlorine will be turned back on for lampoly on Tuesday. We anticipate that basic repairs to the HBr panel will be completed to allow HBr turn on Tuesday to both p5000etch and lampoly. Further repairs and updates to the gas delivery system are planned. We will keep you updated of any planned shutdowns of these gases. By the way, Cesar and Elmer have put in a lot of time to not only make these repairs happen, but put in measures to ensure against further occurrences of this type (Elmer especially, who's been on his own for the past couple of weeks.) Please do let them know they are appreciated -- Thanks, Your SNF staff -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mtang at stanford.edu Wed Oct 24 07:50:55 2007 From: mtang at stanford.edu (Mary Tang) Date: Wed, 24 Oct 2007 07:50:55 -0700 Subject: Strange profiles reported... Message-ID: <471F5BCF.3000708@stanford.edu> Hi all -- See attached. Ching-Mei reports odd profiles on silicon pillars she etched on Saturday. Samples etched just before the system went down for gas issues had perfectly vertical side-wall pillars (lampolyPillarsA.gif). Her recent samples look somewhat conic (lampolyPillarsX.TIF and lampolyPillarsY.TIF). Etch rate of silicon seems normal. Ching-Mei's samples have undergone relatively little processing which suggests a possible machine problem. However, her samples are chips that are mounted on whole wafers, so that may also be a source of variability. In any case, please be aware that she's observed this unusual profile -- you should run tests before committing your wafers. If anyone else has checked profiles recently, good or bad, please do share your observations. In the meantime, we'll run tests to check the machine out. Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu -------------- next part -------------- A non-text attachment was scrubbed... Name: lampolyPillarsY.TIF Type: image/tiff Size: 345904 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: lampolyPillarsA.gif Type: image/gif Size: 20820 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: lampolyPillarsX.TIF Type: image/tiff Size: 345908 bytes Desc: not available URL: