Chlorine problem

Mary Tang mtang at
Fri Sep 14 12:13:18 PDT 2007

Hi everyone --

As you know, there are concerns about the integrity of our chlorine 
line.  We are in the process of collecting information, but as yet, we 
have no definitive answers.  We don't know exactly when chlorine will be 
made available again, although certainly not by this weekend.  Chlorine 
will not be turned on until everyone is assured of its safe operation -- 
however long it takes.  It would be safe to say that this might be at 
least 1 1/2 weeks.

Our apologies for the inconvenience.  If you need other etching 
resources immediately, please consider the Berkeley Microlab (who have a 
nearly identical Lampoly system as well as other Cl2 etching tools) and 
the other NNIN sites ( -- see "Services" for process 
and tool descriptions).


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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