From mtang at stanford.edu  Wed Apr  2 16:37:48 2008
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 02 Apr 2008 16:37:48 -0700
Subject: It's up!
Message-ID: <47F418CC.7010905@stanford.edu>

Hi all --

Just wanted to share the good news.  Lampoly seems to be running just 
fine now.  An etch test of recipe #1 gave an etch depth of 4376A 
(expected 4540) and uniformity of <0.5%.  Resist to Si is 0.8.  Pressure 
controls very nicely now and about 30 wafers processed without 
glitches.  Many thanks to Elmer and Mike for hanging in there!!!

We saw some occasional gap error problems -- please report it if you see 
it.  Elmer is chasing down a replacement switch which should fix this.

Happy processing!!

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu