It's up!

Mary Tang mtang at
Wed Apr 2 16:37:48 PDT 2008

Hi all --

Just wanted to share the good news.  Lampoly seems to be running just 
fine now.  An etch test of recipe #1 gave an etch depth of 4376A 
(expected 4540) and uniformity of <0.5%.  Resist to Si is 0.8.  Pressure 
controls very nicely now and about 30 wafers processed without 
glitches.  Many thanks to Elmer and Mike for hanging in there!!!

We saw some occasional gap error problems -- please report it if you see 
it.  Elmer is chasing down a replacement switch which should fix this.

Happy processing!!


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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