oxide wafers

Maryam Ziaei-Moayyed maryamzm at stanford.edu
Tue May 6 17:07:30 PDT 2008


Hi Mary,

Could we get some oxidized wafers for lampoly cleans? Maybe Nancy has  
some oxide wafers from her oxidation qual runs.

Also I've noticed that some people run long etches without cleaning  
the chamber afterwards. Also everyone please run at least one clean  
(PROGRAM 99) after long etches.

Thanks,
Maryam




More information about the lampoly mailing list