From lwchang at stanford.edu  Sat Apr 11 16:49:25 2009
From: lwchang at stanford.edu (Li-Wen Chang)
Date: Sat, 11 Apr 2009 16:49:25 -0700 (PDT)
Subject: anisotropic Si etch
Message-ID: <1788317185.23741239493765630.JavaMail.root@zm03.stanford.edu>

Dear lampoly users,
I need to etch ~20nm wide and ~50nm high line structure in lampoly.
Right now I've been using recipe 1 and always observed triangular prism structure after etching (narrower on top and wider on the bottom).
Does anyone have a more anisotropic etch recipe that I can use?
Or what parameters I should tune to make the sidewall more straight and not sloped?

Thank you very much,
Li-Wen