From mtang at stanford.edu Thu Jul 9 10:41:19 2009 From: mtang at stanford.edu (Mary Tang) Date: Thu, 09 Jul 2009 10:41:19 -0700 Subject: Lam Poly update In-Reply-To: <002301ca00b8$abca8840$035f98c0$@park@besang.com> References: <002301ca00b8$abca8840$035f98c0$@park@besang.com> Message-ID: <4A562BBF.1040601@stanford.edu> Hi Junil and Lampoly users: My apologies for not posting a formal update sooner. Here's the information as of last night. The clamp assembly was damaged and most of the parts have arrived. The remaining parts are due in on Monday, though we will attempt to get these expedited. In terms of what happened, as far as we can tell, one of the six spring rod assemblies which holds the clamp was binding so that when compressed, it stood more than 1/4" longer than the rest of the rods. In combination with the double-thick sample that was being processed, this resulted in the clamp not pressing parallel to the chuck. You may have seen from the Coral report, the gap drive assembly became jammed as it tried to press down on an uneven surface. And the clamp assembly snapped as a result. Cesar has repaired the gap drive as far as we can tell. Some additional calibrations need to be done. We can probably do this without the whole clamp assembly. So, as best as we can figure, the parts should be here on Monday, so we hope to have everything reassembled then and ready for testing. Usha has kindly agreed to follow up with qualification, should the equipment check out OK. Mary Junil Park wrote: > > Dear Mary > > Good morning. > > Could you update me with the status of Lam Poly. My Silicon Etch > process has been set up on both tool of P-5000 and Lam Poly. But I > have not been able to use both tools, because P-5000 magnet drive of > silicon chamber has moved to oxide chamber and Lam Poly?..as you > know?.. I have to find out alternative if it will not be up soon. > > Thank you in advance. > > Regards > > Junil > > www.besang.com > -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From shott at stanford.edu Wed Jul 15 19:32:03 2009 From: shott at stanford.edu (John Shott) Date: Wed, 15 Jul 2009 19:32:03 -0700 Subject: lampoly update .... Message-ID: <4A5E9123.6010803@stanford.edu> Lam poly community: Here is what I believe the status of the lampoly tool is as of this evening. As you likely know, we broke a couple of clamp rings late the week before last. We were able to get a replacement from Berkeley although we also had to get some little ceramic clips. Mary, Elmer, and Cesar determined that the electrode gap separation was not properly calibrated. Late last week, Mary spent a fair amount of time working on that calibration and in properly setting the limit switches, but did not complete this task before leaving for vacation. Cesar has since spent some time with the tool and has determined that we need a thinner set of ceramic clips and is working on getting those ASAP. Elmer has also arranged to have Lam field service come in to try to get the tool properly calibrated. Because this is Semicon week, that has been difficult to schedule. We expect, however, that they will be in on Friday to get the gap calibration and limits properly set. Will the tool be released for use by the end of the week? I hope so but, at this point, can't guarantee it. That is my understanding at the moment. Let me know if you have any questions, John From riteshj at ee.ucla.edu Fri Jul 24 16:01:48 2009 From: riteshj at ee.ucla.edu (Ritesh Jhaveri) Date: Fri, 24 Jul 2009 16:01:48 -0700 (PDT) Subject: LAMPOLY free from 4-7 pm Message-ID: Finsihed Early. THank you, Ritesh J