Warning: No CF4 gas

Mary Tang mtang at stanford.edu
Mon Feb 22 13:21:47 PST 2010


Hi all --


The CF4 cylinder has been replaced.  Although the cylinder change is 
routine and no problems are anticipated, staff have not yet run etch 
rates.  Please check before running your critical material and let us 
know if you observe problems.


Your SNF Staff



Mary Tang wrote:
> Apologies everyone, but it looks like the CF4 cylinder has run dry.  
> This affects drytek1/2, mrc, p5000etch, pquest, sts (dep) and 
> lampoly.  We will address this as soon as possible.
>
> Your SNF Staff
>
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




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