Recipe 1

Chia-Ming Chang cachang at
Tue Sep 20 11:03:59 PDT 2011

Dear Lampoly user,

I used recipe 1 for my anisotropic silicon etch, and expected to see straight sidewall. I have an array of holes with 500nm in diameter and SiO2 as hard mask. I want to etch down into single crystal silicon for 1.5um. However, the sidewalls are not straight from SEM; instead, I got a V-shape. I thought recipe 1 should be very straight, and I was wondering if people have developed different recipes for anisotropic silicon etch in Lampoly.


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