[lampoly] Lampoly Update

Mary Tang mtang at stanford.edu
Wed May 8 21:40:52 PDT 2013

Dear lampoly users --

Today marks exactly 3 months since lampoly went down, hard.  I know an 
update is long overdue and am sorry to say I've no news to report.  
Although this machine is not very well utilized, it has certain special 
capabilities.  I expect many people have found alternatives acceptable 
for less critical processes (amtetcher, p5000etch ChC) but that those 
who need precision etch control this system can achieve are at a loss.

SNF staff are investigating several possible solutions, both near and 
long term.

In the near term, the UC Berkeley Marvel lab has a nearly identical 
system with the same base processes.  If you would like to explore this 
alternative, please get in touch with me, as we are setting up a process 
for moving material and/or people between our two labs. I'd also like to 
take the liberty of offering up the process expertise of J Provine, who 
is familiar with and has used the Berkeley system and Ed, who is in the 
process of mapping Berkeley and SNF processes.  Ed and Brett have also 
begun working with Kim to see if one of the new PlasmaTherm etchers can 
meet her process needs - it's not likely to be a one-to-one match, but 
may offer the vertical wall profiles and clean etch she requires.  If 
anyone is interested in helping, I am sure it would appreciated.

Longer term, we will need to come up with a solution that gives us a 
system that is supportable -- in recent years, downtime has become 
increasingly high for the low use this system sees.  Lam does not 
service this legacy system and quality third-party service has been 
difficult to find.  The solution may be to upgrade our system to current 
standard or perhaps replace it altogether.  Ed & Brett are looking into 
upgrade options now.  We expect to decide in coming weeks, but execution 
may still be months.  Meanwhile, the maintenance team continues to track 
down replacement parts and boards.

Lastly, Kim suggests that the Lam user community work together to share 
information and resources.   I believe membership of this mail list 
(lampoly at snf.stanford.edu) is comprised of everyone with a badger 
account who is qualified on lampoly as of mid-February. Please feel free 
to forward to anyone you know who might not be on the list, either 
because they haven't been qualified on the lam but would like to be 
(like Kim) or haven't made the leap to Badger yet. (Anyone can subscribe 
at: http://snf.stanford.edu/mailman/listinfo)

Thanks for your attention -- and patience --


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

More information about the lampoly mailing list