From jparker at snf.stanford.edu Wed Aug 4 07:34:13 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 4 Aug 2010 07:34:13 -0700 Subject: Comment laurell-R SNF 2010-08-04 07:34:12: ACL3 no longer works Message-ID: ACL index of 3 does not get chuck spinning to a low rpm (such as 500rpm) as it did in July. ACL index of 4 works just fine. Just noting this minor degredation in performance---hopefully it's cleanable. From mahnaz at snf.stanford.edu Fri Aug 6 14:30:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Aug 2010 14:30:35 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: noticed during training. From gsosa at snf.stanford.edu Fri Aug 6 15:14:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Aug 2010 15:14:43 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: Replaced bottom sealing o-ring. Cleaned top surface of chuck. Cleaned vacuum solenoid stem and plunger. Vacuum OK now at 19.4 " H2O with wafer on chuck. Tested operation with standard program- All OK From fungus at snf.stanford.edu Wed Aug 11 13:46:42 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 11 Aug 2010 13:46:42 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: chuck is not spinning From gsosa at snf.stanford.edu Wed Aug 11 16:23:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Aug 2010 16:23:00 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: Spindle shaft had heavy resistance. Cleaned the spindle shaft. Shaft now spins freely. From jparker at snf.stanford.edu Wed Aug 4 07:34:13 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 4 Aug 2010 07:34:13 -0700 Subject: Comment laurell-R SNF 2010-08-04 07:34:12: ACL3 no longer works Message-ID: ACL index of 3 does not get chuck spinning to a low rpm (such as 500rpm) as it did in July. ACL index of 4 works just fine. Just noting this minor degredation in performance---hopefully it's cleanable. From mahnaz at snf.stanford.edu Fri Aug 6 14:30:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Aug 2010 14:30:35 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: noticed during training. From gsosa at snf.stanford.edu Fri Aug 6 15:14:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Aug 2010 15:14:43 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: Replaced bottom sealing o-ring. Cleaned top surface of chuck. Cleaned vacuum solenoid stem and plunger. Vacuum OK now at 19.4 " H2O with wafer on chuck. Tested operation with standard program- All OK From fungus at snf.stanford.edu Wed Aug 11 13:46:42 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 11 Aug 2010 13:46:42 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: chuck is not spinning From gsosa at snf.stanford.edu Wed Aug 11 16:23:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Aug 2010 16:23:00 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: Spindle shaft had heavy resistance. Cleaned the spindle shaft. Shaft now spins freely. From jparker at snf.stanford.edu Wed Aug 4 07:34:13 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 4 Aug 2010 07:34:13 -0700 Subject: Comment laurell-R SNF 2010-08-04 07:34:12: ACL3 no longer works Message-ID: ACL index of 3 does not get chuck spinning to a low rpm (such as 500rpm) as it did in July. ACL index of 4 works just fine. Just noting this minor degredation in performance---hopefully it's cleanable. From mahnaz at snf.stanford.edu Fri Aug 6 14:30:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Aug 2010 14:30:35 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: noticed during training. From gsosa at snf.stanford.edu Fri Aug 6 15:14:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Aug 2010 15:14:43 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: Replaced bottom sealing o-ring. Cleaned top surface of chuck. Cleaned vacuum solenoid stem and plunger. Vacuum OK now at 19.4 " H2O with wafer on chuck. Tested operation with standard program- All OK From fungus at snf.stanford.edu Wed Aug 11 13:46:42 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 11 Aug 2010 13:46:42 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: chuck is not spinning From gsosa at snf.stanford.edu Wed Aug 11 16:23:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Aug 2010 16:23:00 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: Spindle shaft had heavy resistance. Cleaned the spindle shaft. Shaft now spins freely. From jparker at snf.stanford.edu Wed Aug 4 07:34:13 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 4 Aug 2010 07:34:13 -0700 Subject: Comment laurell-R SNF 2010-08-04 07:34:12: ACL3 no longer works Message-ID: ACL index of 3 does not get chuck spinning to a low rpm (such as 500rpm) as it did in July. ACL index of 4 works just fine. Just noting this minor degredation in performance---hopefully it's cleanable. From mahnaz at snf.stanford.edu Fri Aug 6 14:30:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Aug 2010 14:30:35 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: noticed during training. From gsosa at snf.stanford.edu Fri Aug 6 15:14:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Aug 2010 15:14:43 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: Replaced bottom sealing o-ring. Cleaned top surface of chuck. Cleaned vacuum solenoid stem and plunger. Vacuum OK now at 19.4 " H2O with wafer on chuck. Tested operation with standard program- All OK From fungus at snf.stanford.edu Wed Aug 11 13:46:42 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 11 Aug 2010 13:46:42 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: chuck is not spinning From gsosa at snf.stanford.edu Wed Aug 11 16:23:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Aug 2010 16:23:00 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: Spindle shaft had heavy resistance. Cleaned the spindle shaft. Shaft now spins freely. From jparker at snf.stanford.edu Wed Aug 4 07:34:13 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 4 Aug 2010 07:34:13 -0700 Subject: Comment laurell-R SNF 2010-08-04 07:34:12: ACL3 no longer works Message-ID: ACL index of 3 does not get chuck spinning to a low rpm (such as 500rpm) as it did in July. ACL index of 4 works just fine. Just noting this minor degredation in performance---hopefully it's cleanable. From mahnaz at snf.stanford.edu Fri Aug 6 14:30:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Aug 2010 14:30:35 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: noticed during training. From gsosa at snf.stanford.edu Fri Aug 6 15:14:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Aug 2010 15:14:43 -0700 Subject: Problem laurell-R SNF 2010-08-06 14:30:34: vacum issue Message-ID: Replaced bottom sealing o-ring. Cleaned top surface of chuck. Cleaned vacuum solenoid stem and plunger. Vacuum OK now at 19.4 " H2O with wafer on chuck. Tested operation with standard program- All OK From fungus at snf.stanford.edu Wed Aug 11 13:46:42 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Wed, 11 Aug 2010 13:46:42 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: chuck is not spinning From gsosa at snf.stanford.edu Wed Aug 11 16:23:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Aug 2010 16:23:00 -0700 Subject: Shutdown laurell-R SNF 2010-08-11 13:46:42: not spinning Message-ID: Spindle shaft had heavy resistance. Cleaned the spindle shaft. Shaft now spins freely.