Comment laurell-R SNF 2010-06-17 08:59:26: Inspected and cleaned vacuum solenoid.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jun 17 08:59:27 PDT 2010 

Inspected and cleaned vacuum solenoid cxleaned catch cup and 
Exhaust system Also cleaned up the spindle shaft, cycled wafers
Good to use.

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