From justinwu at snf.stanford.edu Mon Aug 15 20:51:50 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Mon, 15 Aug 2011 20:51:50 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: From vilanova at snf.stanford.edu Tue Aug 16 11:51:18 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Aug 2011 11:51:18 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: From gsosa at snf.stanford.edu Tue Aug 16 16:07:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:21 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From gsosa at snf.stanford.edu Tue Aug 16 16:07:27 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:27 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From lindaw at snf.stanford.edu Wed Aug 17 13:23:21 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 17 Aug 2011 13:23:21 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: 300 rpm spin slow to start due to stiffness in the spindle rotation. spun 10 wafers at 2000 rpm and the stiffness did not get any looser. Also, good vacuum, but it takes a couple of seconds to get up to 19 - 20 max. From vilanova at snf.stanford.edu Wed Aug 17 14:43:26 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Aug 2011 14:43:26 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: Cleaned Up spindle , Spindle Rotation Ok Now , Ran same recipe and system working Fine, From joem at snf.stanford.edu Mon Aug 22 12:10:49 2011 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Mon, 22 Aug 2011 12:10:49 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Not getting adequate vacuum for small or full size wafers. It's just under the limit for full size wafers. Joe From gsosa at snf.stanford.edu Tue Aug 23 11:24:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Aug 2011 11:24:06 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Replaced vacuum line from solinoid to spinner unit. Still same problem. Replaced vacuum supply line from service chase to vacuum solinoid. Vacuum supply OK now. Vacuum on pieces chuck now 18+ " Hg. Chuck vacuum is also very responsive. Tested operation with standard program- All OK. From justinwu at snf.stanford.edu Mon Aug 15 20:51:50 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Mon, 15 Aug 2011 20:51:50 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: From vilanova at snf.stanford.edu Tue Aug 16 11:51:18 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Aug 2011 11:51:18 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: From gsosa at snf.stanford.edu Tue Aug 16 16:07:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:21 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From gsosa at snf.stanford.edu Tue Aug 16 16:07:27 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:27 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From lindaw at snf.stanford.edu Wed Aug 17 13:23:21 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 17 Aug 2011 13:23:21 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: 300 rpm spin slow to start due to stiffness in the spindle rotation. spun 10 wafers at 2000 rpm and the stiffness did not get any looser. Also, good vacuum, but it takes a couple of seconds to get up to 19 - 20 max. From vilanova at snf.stanford.edu Wed Aug 17 14:43:26 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Aug 2011 14:43:26 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: Cleaned Up spindle , Spindle Rotation Ok Now , Ran same recipe and system working Fine, From joem at snf.stanford.edu Mon Aug 22 12:10:49 2011 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Mon, 22 Aug 2011 12:10:49 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Not getting adequate vacuum for small or full size wafers. It's just under the limit for full size wafers. Joe From gsosa at snf.stanford.edu Tue Aug 23 11:24:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Aug 2011 11:24:06 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Replaced vacuum line from solinoid to spinner unit. Still same problem. Replaced vacuum supply line from service chase to vacuum solinoid. Vacuum supply OK now. Vacuum on pieces chuck now 18+ " Hg. Chuck vacuum is also very responsive. Tested operation with standard program- All OK. From justinwu at snf.stanford.edu Mon Aug 15 20:51:50 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Mon, 15 Aug 2011 20:51:50 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: From vilanova at snf.stanford.edu Tue Aug 16 11:51:18 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Aug 2011 11:51:18 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: From gsosa at snf.stanford.edu Tue Aug 16 16:07:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:21 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From gsosa at snf.stanford.edu Tue Aug 16 16:07:27 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:27 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From lindaw at snf.stanford.edu Wed Aug 17 13:23:21 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 17 Aug 2011 13:23:21 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: 300 rpm spin slow to start due to stiffness in the spindle rotation. spun 10 wafers at 2000 rpm and the stiffness did not get any looser. Also, good vacuum, but it takes a couple of seconds to get up to 19 - 20 max. From vilanova at snf.stanford.edu Wed Aug 17 14:43:26 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Aug 2011 14:43:26 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: Cleaned Up spindle , Spindle Rotation Ok Now , Ran same recipe and system working Fine, From joem at snf.stanford.edu Mon Aug 22 12:10:49 2011 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Mon, 22 Aug 2011 12:10:49 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Not getting adequate vacuum for small or full size wafers. It's just under the limit for full size wafers. Joe From gsosa at snf.stanford.edu Tue Aug 23 11:24:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Aug 2011 11:24:06 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Replaced vacuum line from solinoid to spinner unit. Still same problem. Replaced vacuum supply line from service chase to vacuum solinoid. Vacuum supply OK now. Vacuum on pieces chuck now 18+ " Hg. Chuck vacuum is also very responsive. Tested operation with standard program- All OK. From justinwu at snf.stanford.edu Mon Aug 15 20:51:50 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Mon, 15 Aug 2011 20:51:50 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: From vilanova at snf.stanford.edu Tue Aug 16 11:51:18 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Aug 2011 11:51:18 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: From gsosa at snf.stanford.edu Tue Aug 16 16:07:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:21 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From gsosa at snf.stanford.edu Tue Aug 16 16:07:27 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:27 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From lindaw at snf.stanford.edu Wed Aug 17 13:23:21 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 17 Aug 2011 13:23:21 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: 300 rpm spin slow to start due to stiffness in the spindle rotation. spun 10 wafers at 2000 rpm and the stiffness did not get any looser. Also, good vacuum, but it takes a couple of seconds to get up to 19 - 20 max. From vilanova at snf.stanford.edu Wed Aug 17 14:43:26 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Aug 2011 14:43:26 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: Cleaned Up spindle , Spindle Rotation Ok Now , Ran same recipe and system working Fine, From joem at snf.stanford.edu Mon Aug 22 12:10:49 2011 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Mon, 22 Aug 2011 12:10:49 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Not getting adequate vacuum for small or full size wafers. It's just under the limit for full size wafers. Joe From gsosa at snf.stanford.edu Tue Aug 23 11:24:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Aug 2011 11:24:06 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Replaced vacuum line from solinoid to spinner unit. Still same problem. Replaced vacuum supply line from service chase to vacuum solinoid. Vacuum supply OK now. Vacuum on pieces chuck now 18+ " Hg. Chuck vacuum is also very responsive. Tested operation with standard program- All OK. From justinwu at snf.stanford.edu Mon Aug 15 20:51:50 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Mon, 15 Aug 2011 20:51:50 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: From vilanova at snf.stanford.edu Tue Aug 16 11:51:18 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Aug 2011 11:51:18 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: From gsosa at snf.stanford.edu Tue Aug 16 16:07:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:21 -0700 Subject: Shutdown laurell-R SNF 2011-08-16 11:51:18: Wrking On Vacuum Issues.... Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From gsosa at snf.stanford.edu Tue Aug 16 16:07:27 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:07:27 -0700 Subject: Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low Message-ID: Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with a wafer and chuck. Tested operation with standard program. All OK now. From lindaw at snf.stanford.edu Wed Aug 17 13:23:21 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 17 Aug 2011 13:23:21 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: 300 rpm spin slow to start due to stiffness in the spindle rotation. spun 10 wafers at 2000 rpm and the stiffness did not get any looser. Also, good vacuum, but it takes a couple of seconds to get up to 19 - 20 max. From vilanova at snf.stanford.edu Wed Aug 17 14:43:26 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Aug 2011 14:43:26 -0700 Subject: Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff Message-ID: Cleaned Up spindle , Spindle Rotation Ok Now , Ran same recipe and system working Fine, From joem at snf.stanford.edu Mon Aug 22 12:10:49 2011 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Mon, 22 Aug 2011 12:10:49 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Not getting adequate vacuum for small or full size wafers. It's just under the limit for full size wafers. Joe From gsosa at snf.stanford.edu Tue Aug 23 11:24:06 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Aug 2011 11:24:06 -0700 Subject: Problem laurell-R SNF 2011-08-22 12:10:48: vacuum Message-ID: Replaced vacuum line from solinoid to spinner unit. Still same problem. Replaced vacuum supply line from service chase to vacuum solinoid. Vacuum supply OK now. Vacuum on pieces chuck now 18+ " Hg. Chuck vacuum is also very responsive. Tested operation with standard program- All OK.