Comment laurell-R SNF 2011-08-15 20:51:50: Vacuum pressure low

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Aug 16 16:07:27 PDT 2011


Vacuum at spindle only 13.8" Hg. Not enough to satisfy the vacuum sensor. Verified incoming supply vacuum- OK at 25" Hg. Verified all pneumatic lines and solinoid- All OK. Isolated loss of spindle vacuum to shaft seal. Replaced the shaft seal. Now vacum at spindle is 21.3" Hg with  a wafer and chuck. Tested operation with standard program. All OK now.




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