Comment laurell-R SNF 2011-08-17 13:23:20: spindle rotation stiff

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Aug 17 13:23:21 PDT 2011


300 rpm spin slow to start due to stiffness in the spindle rotation.  spun 10 wafers at 2000 rpm and the stiffness did not get any looser.  Also, good vacuum, but it takes a couple of seconds to get up to 19 - 20 max.




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