From jaehlee at snf.stanford.edu Tue Feb 8 23:43:29 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Tue, 8 Feb 2011 23:43:29 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: From jaehlee at snf.stanford.edu Thu Feb 10 17:38:51 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Thu, 10 Feb 2011 17:38:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: From vilanova at snf.stanford.edu Fri Feb 11 09:25:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:38 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: Fixed a few weeks ago. From vilanova at snf.stanford.edu Fri Feb 11 09:25:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:44 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: cleaned From vilanova at snf.stanford.edu Fri Feb 11 09:25:51 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: cleaned. From vilanova at snf.stanford.edu Fri Feb 11 09:26:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:06 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: fixed. From vilanova at snf.stanford.edu Fri Feb 11 09:26:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:22 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Fixed From ehe at snf.stanford.edu Wed Feb 16 23:00:53 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 16 Feb 2011 23:00:53 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Tried every different bottle of resist in cabinet using usual recipe on laurell with terrible results two days in a row. Resist is not spinning smoothly - something changed since Dec 2010. Last time this happened an old bottle of resist was the culprit. The large and small bottles of 3612 have totally different consistencies. From lindaw at snf.stanford.edu Thu Feb 17 12:30:39 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:30:39 -0800 Subject: Comment laurell-R SNF 2011-02-17 12:30:39: there seems to be a small leak in O ring top Message-ID: There seems to be a small air leak past the top cover O ring near the screw at 8 O'clock, Just to the upper left of the screw. Dribbled a bit of acetone on the outside and saw it get sucked into the bowl. This is similar to the problem I had earlier this year with non uniform spins, and was fixed at that time. Perhaps this screw has loosened? From mahnaz at snf.stanford.edu Thu Feb 17 12:43:03 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:43:03 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: I ran wafers and the uniformity does not look good. Tested the top lid with acetone and the left side forward it seems that leaking. Have talked to Gary , they will check out the system after lunch. From gsosa at snf.stanford.edu Thu Feb 17 14:54:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:48 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now. From gsosa at snf.stanford.edu Thu Feb 17 14:54:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:59 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now. From jaehlee at snf.stanford.edu Tue Feb 8 23:43:29 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Tue, 8 Feb 2011 23:43:29 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: From jaehlee at snf.stanford.edu Thu Feb 10 17:38:51 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Thu, 10 Feb 2011 17:38:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: From vilanova at snf.stanford.edu Fri Feb 11 09:25:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:38 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: Fixed a few weeks ago. From vilanova at snf.stanford.edu Fri Feb 11 09:25:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:44 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: cleaned From vilanova at snf.stanford.edu Fri Feb 11 09:25:51 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: cleaned. From vilanova at snf.stanford.edu Fri Feb 11 09:26:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:06 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: fixed. From vilanova at snf.stanford.edu Fri Feb 11 09:26:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:22 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Fixed From ehe at snf.stanford.edu Wed Feb 16 23:00:53 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 16 Feb 2011 23:00:53 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Tried every different bottle of resist in cabinet using usual recipe on laurell with terrible results two days in a row. Resist is not spinning smoothly - something changed since Dec 2010. Last time this happened an old bottle of resist was the culprit. The large and small bottles of 3612 have totally different consistencies. From lindaw at snf.stanford.edu Thu Feb 17 12:30:39 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:30:39 -0800 Subject: Comment laurell-R SNF 2011-02-17 12:30:39: there seems to be a small leak in O ring top Message-ID: There seems to be a small air leak past the top cover O ring near the screw at 8 O'clock, Just to the upper left of the screw. Dribbled a bit of acetone on the outside and saw it get sucked into the bowl. This is similar to the problem I had earlier this year with non uniform spins, and was fixed at that time. Perhaps this screw has loosened? From mahnaz at snf.stanford.edu Thu Feb 17 12:43:03 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:43:03 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: I ran wafers and the uniformity does not look good. Tested the top lid with acetone and the left side forward it seems that leaking. Have talked to Gary , they will check out the system after lunch. From gsosa at snf.stanford.edu Thu Feb 17 14:54:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:48 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now. From gsosa at snf.stanford.edu Thu Feb 17 14:54:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:59 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now. From jaehlee at snf.stanford.edu Tue Feb 8 23:43:29 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Tue, 8 Feb 2011 23:43:29 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: From jaehlee at snf.stanford.edu Thu Feb 10 17:38:51 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Thu, 10 Feb 2011 17:38:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: From vilanova at snf.stanford.edu Fri Feb 11 09:25:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:38 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: Fixed a few weeks ago. From vilanova at snf.stanford.edu Fri Feb 11 09:25:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:44 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: cleaned From vilanova at snf.stanford.edu Fri Feb 11 09:25:51 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: cleaned. From vilanova at snf.stanford.edu Fri Feb 11 09:26:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:06 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: fixed. From vilanova at snf.stanford.edu Fri Feb 11 09:26:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:22 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Fixed From ehe at snf.stanford.edu Wed Feb 16 23:00:53 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 16 Feb 2011 23:00:53 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Tried every different bottle of resist in cabinet using usual recipe on laurell with terrible results two days in a row. Resist is not spinning smoothly - something changed since Dec 2010. Last time this happened an old bottle of resist was the culprit. The large and small bottles of 3612 have totally different consistencies. From lindaw at snf.stanford.edu Thu Feb 17 12:30:39 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:30:39 -0800 Subject: Comment laurell-R SNF 2011-02-17 12:30:39: there seems to be a small leak in O ring top Message-ID: There seems to be a small air leak past the top cover O ring near the screw at 8 O'clock, Just to the upper left of the screw. Dribbled a bit of acetone on the outside and saw it get sucked into the bowl. This is similar to the problem I had earlier this year with non uniform spins, and was fixed at that time. Perhaps this screw has loosened? From mahnaz at snf.stanford.edu Thu Feb 17 12:43:03 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:43:03 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: I ran wafers and the uniformity does not look good. Tested the top lid with acetone and the left side forward it seems that leaking. Have talked to Gary , they will check out the system after lunch. From gsosa at snf.stanford.edu Thu Feb 17 14:54:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:48 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now. From gsosa at snf.stanford.edu Thu Feb 17 14:54:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:59 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now. From jaehlee at snf.stanford.edu Tue Feb 8 23:43:29 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Tue, 8 Feb 2011 23:43:29 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: From jaehlee at snf.stanford.edu Thu Feb 10 17:38:51 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Thu, 10 Feb 2011 17:38:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: From vilanova at snf.stanford.edu Fri Feb 11 09:25:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:38 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: Fixed a few weeks ago. From vilanova at snf.stanford.edu Fri Feb 11 09:25:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:44 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: cleaned From vilanova at snf.stanford.edu Fri Feb 11 09:25:51 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: cleaned. From vilanova at snf.stanford.edu Fri Feb 11 09:26:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:06 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: fixed. From vilanova at snf.stanford.edu Fri Feb 11 09:26:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:22 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Fixed From ehe at snf.stanford.edu Wed Feb 16 23:00:53 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 16 Feb 2011 23:00:53 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Tried every different bottle of resist in cabinet using usual recipe on laurell with terrible results two days in a row. Resist is not spinning smoothly - something changed since Dec 2010. Last time this happened an old bottle of resist was the culprit. The large and small bottles of 3612 have totally different consistencies. From lindaw at snf.stanford.edu Thu Feb 17 12:30:39 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:30:39 -0800 Subject: Comment laurell-R SNF 2011-02-17 12:30:39: there seems to be a small leak in O ring top Message-ID: There seems to be a small air leak past the top cover O ring near the screw at 8 O'clock, Just to the upper left of the screw. Dribbled a bit of acetone on the outside and saw it get sucked into the bowl. This is similar to the problem I had earlier this year with non uniform spins, and was fixed at that time. Perhaps this screw has loosened? From mahnaz at snf.stanford.edu Thu Feb 17 12:43:03 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:43:03 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: I ran wafers and the uniformity does not look good. Tested the top lid with acetone and the left side forward it seems that leaking. Have talked to Gary , they will check out the system after lunch. From gsosa at snf.stanford.edu Thu Feb 17 14:54:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:48 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now. From gsosa at snf.stanford.edu Thu Feb 17 14:54:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:59 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now. From jaehlee at snf.stanford.edu Tue Feb 8 23:43:29 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Tue, 8 Feb 2011 23:43:29 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: From jaehlee at snf.stanford.edu Thu Feb 10 17:38:51 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Thu, 10 Feb 2011 17:38:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: From vilanova at snf.stanford.edu Fri Feb 11 09:25:38 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:38 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: Fixed a few weeks ago. From vilanova at snf.stanford.edu Fri Feb 11 09:25:44 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:44 -0800 Subject: Comment laurell-R SNF 2011-02-08 23:43:28: previous user didn't clean well enough Message-ID: cleaned From vilanova at snf.stanford.edu Fri Feb 11 09:25:51 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:25:51 -0800 Subject: Comment laurell-R SNF 2011-02-10 17:38:51: previous user didn't clean well enough again! Message-ID: cleaned. From vilanova at snf.stanford.edu Fri Feb 11 09:26:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:06 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: fixed. From vilanova at snf.stanford.edu Fri Feb 11 09:26:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:26:22 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Fixed From ehe at snf.stanford.edu Wed Feb 16 23:00:53 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 16 Feb 2011 23:00:53 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Tried every different bottle of resist in cabinet using usual recipe on laurell with terrible results two days in a row. Resist is not spinning smoothly - something changed since Dec 2010. Last time this happened an old bottle of resist was the culprit. The large and small bottles of 3612 have totally different consistencies. From lindaw at snf.stanford.edu Thu Feb 17 12:30:39 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:30:39 -0800 Subject: Comment laurell-R SNF 2011-02-17 12:30:39: there seems to be a small leak in O ring top Message-ID: There seems to be a small air leak past the top cover O ring near the screw at 8 O'clock, Just to the upper left of the screw. Dribbled a bit of acetone on the outside and saw it get sucked into the bowl. This is similar to the problem I had earlier this year with non uniform spins, and was fixed at that time. Perhaps this screw has loosened? From mahnaz at snf.stanford.edu Thu Feb 17 12:43:03 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Feb 2011 12:43:03 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: I ran wafers and the uniformity does not look good. Tested the top lid with acetone and the left side forward it seems that leaking. Have talked to Gary , they will check out the system after lunch. From gsosa at snf.stanford.edu Thu Feb 17 14:54:48 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:48 -0800 Subject: Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now. From gsosa at snf.stanford.edu Thu Feb 17 14:54:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 17 Feb 2011 14:54:59 -0800 Subject: Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking Message-ID: Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now.