Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Feb 17 14:54:48 PST 2011


Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now.




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