Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking

gsosa at gsosa at
Thu Feb 17 14:54:59 PST 2011

Checked with 3612 and 4" wafers- Getting poor spin in midlde of wafer. Increased exhaust from .1" H2O to .6" H2). Retested with 4" wafers. Spin quality looks very good now.

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