Problem laurell-R SNF 2011-02-16 23:00:52: poor spin results

ehe at snf.stanford.edu ehe at snf.stanford.edu
Wed Feb 16 23:00:53 PST 2011


Tried every different bottle of resist in cabinet using usual recipe on laurell with terrible results two days in a row. Resist is not spinning smoothly - something changed since Dec 2010. Last time this happened an old bottle of resist was the culprit. The large and small bottles of 3612 have totally different consistencies. 




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