Shutdown laurell-R SNF 2011-02-17 12:43:03: the top lid is leaking

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Feb 17 12:43:03 PST 2011

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I ran wafers and the uniformity does not look good.
Tested the top lid  with acetone  and the left side forward it seems that leaking. Have talked to Gary ,  they will check out the system after lunch.

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