From gsosa at snf.stanford.edu Tue Jan 4 15:50:02 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Jan 2011 15:50:02 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: System was late in shipping from vendor. Expect delivery tomorrow, late AM. Installation and testing to follow. From vilanova at snf.stanford.edu Wed Jan 5 14:38:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:22 -0800 Subject: Shutdown laurell-R SNF 2010-12-15 10:43:31: Sending out for PM Message-ID: Installation and Testing Completed, Ok to use. From vilanova at snf.stanford.edu Wed Jan 5 14:38:28 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:28 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: Installation and Testing Completed, Ok to use. From lindaw at snf.stanford.edu Fri Jan 7 11:16:45 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:16:45 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: I spun some wafers, and even when using the tape over the top cover hole, there seems to be an airflow leak into the chamber during spin. This lead to results that look only slightly better than if the hole remained open during the spin. I ran one wafer while pressing down on the clear cover at the screw at 8 O'Clock and the uniformity was much better. I suspect that there is a leak around the top cover O-ring at this site. Perhaps the screws need to be tightened a bit to seal the O-ring better? From lindaw at snf.stanford.edu Fri Jan 7 11:30:53 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:30:53 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: I verified while cleaning that the screw at 8 O'Clock is definitely leaking air into the chamber. With tape over the top cover hole, I sprayed a few drops of acetone near the outside of the screw, and the acetone was sucked into the chamber immediately. From mahnaz at snf.stanford.edu Fri Jan 7 15:48:31 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 Jan 2011 15:48:31 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Ran wafers they do not look uniform. When applied resist on the center all drifted to the top of the wafer just sitting on the chuck for 3 seconds. I like the exhaust to be checked as well. Kaveh had the same issues with the system. From justinwu at snf.stanford.edu Thu Jan 13 11:21:04 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Thu, 13 Jan 2011 11:21:04 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Spun 2% PMMA at 3000rpm on 4in wafer, no visible fringe effects after spin (uniform color). From gsosa at snf.stanford.edu Thu Jan 13 16:17:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Jan 2011 16:17:24 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Reduced the exhaust to the process area. After exhaust adjustment test wafers looked good. From gsosa at snf.stanford.edu Tue Jan 4 15:50:02 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Jan 2011 15:50:02 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: System was late in shipping from vendor. Expect delivery tomorrow, late AM. Installation and testing to follow. From vilanova at snf.stanford.edu Wed Jan 5 14:38:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:22 -0800 Subject: Shutdown laurell-R SNF 2010-12-15 10:43:31: Sending out for PM Message-ID: Installation and Testing Completed, Ok to use. From vilanova at snf.stanford.edu Wed Jan 5 14:38:28 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:28 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: Installation and Testing Completed, Ok to use. From lindaw at snf.stanford.edu Fri Jan 7 11:16:45 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:16:45 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: I spun some wafers, and even when using the tape over the top cover hole, there seems to be an airflow leak into the chamber during spin. This lead to results that look only slightly better than if the hole remained open during the spin. I ran one wafer while pressing down on the clear cover at the screw at 8 O'Clock and the uniformity was much better. I suspect that there is a leak around the top cover O-ring at this site. Perhaps the screws need to be tightened a bit to seal the O-ring better? From lindaw at snf.stanford.edu Fri Jan 7 11:30:53 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:30:53 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: I verified while cleaning that the screw at 8 O'Clock is definitely leaking air into the chamber. With tape over the top cover hole, I sprayed a few drops of acetone near the outside of the screw, and the acetone was sucked into the chamber immediately. From mahnaz at snf.stanford.edu Fri Jan 7 15:48:31 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 Jan 2011 15:48:31 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Ran wafers they do not look uniform. When applied resist on the center all drifted to the top of the wafer just sitting on the chuck for 3 seconds. I like the exhaust to be checked as well. Kaveh had the same issues with the system. From justinwu at snf.stanford.edu Thu Jan 13 11:21:04 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Thu, 13 Jan 2011 11:21:04 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Spun 2% PMMA at 3000rpm on 4in wafer, no visible fringe effects after spin (uniform color). From gsosa at snf.stanford.edu Thu Jan 13 16:17:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Jan 2011 16:17:24 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Reduced the exhaust to the process area. After exhaust adjustment test wafers looked good. From gsosa at snf.stanford.edu Tue Jan 4 15:50:02 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Jan 2011 15:50:02 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: System was late in shipping from vendor. Expect delivery tomorrow, late AM. Installation and testing to follow. From vilanova at snf.stanford.edu Wed Jan 5 14:38:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:22 -0800 Subject: Shutdown laurell-R SNF 2010-12-15 10:43:31: Sending out for PM Message-ID: Installation and Testing Completed, Ok to use. From vilanova at snf.stanford.edu Wed Jan 5 14:38:28 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:28 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: Installation and Testing Completed, Ok to use. From lindaw at snf.stanford.edu Fri Jan 7 11:16:45 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:16:45 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: I spun some wafers, and even when using the tape over the top cover hole, there seems to be an airflow leak into the chamber during spin. This lead to results that look only slightly better than if the hole remained open during the spin. I ran one wafer while pressing down on the clear cover at the screw at 8 O'Clock and the uniformity was much better. I suspect that there is a leak around the top cover O-ring at this site. Perhaps the screws need to be tightened a bit to seal the O-ring better? From lindaw at snf.stanford.edu Fri Jan 7 11:30:53 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:30:53 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: I verified while cleaning that the screw at 8 O'Clock is definitely leaking air into the chamber. With tape over the top cover hole, I sprayed a few drops of acetone near the outside of the screw, and the acetone was sucked into the chamber immediately. From mahnaz at snf.stanford.edu Fri Jan 7 15:48:31 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 Jan 2011 15:48:31 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Ran wafers they do not look uniform. When applied resist on the center all drifted to the top of the wafer just sitting on the chuck for 3 seconds. I like the exhaust to be checked as well. Kaveh had the same issues with the system. From justinwu at snf.stanford.edu Thu Jan 13 11:21:04 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Thu, 13 Jan 2011 11:21:04 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Spun 2% PMMA at 3000rpm on 4in wafer, no visible fringe effects after spin (uniform color). From gsosa at snf.stanford.edu Thu Jan 13 16:17:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Jan 2011 16:17:24 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Reduced the exhaust to the process area. After exhaust adjustment test wafers looked good. From gsosa at snf.stanford.edu Tue Jan 4 15:50:02 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Jan 2011 15:50:02 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: System was late in shipping from vendor. Expect delivery tomorrow, late AM. Installation and testing to follow. From vilanova at snf.stanford.edu Wed Jan 5 14:38:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:22 -0800 Subject: Shutdown laurell-R SNF 2010-12-15 10:43:31: Sending out for PM Message-ID: Installation and Testing Completed, Ok to use. From vilanova at snf.stanford.edu Wed Jan 5 14:38:28 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:28 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: Installation and Testing Completed, Ok to use. From lindaw at snf.stanford.edu Fri Jan 7 11:16:45 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:16:45 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: I spun some wafers, and even when using the tape over the top cover hole, there seems to be an airflow leak into the chamber during spin. This lead to results that look only slightly better than if the hole remained open during the spin. I ran one wafer while pressing down on the clear cover at the screw at 8 O'Clock and the uniformity was much better. I suspect that there is a leak around the top cover O-ring at this site. Perhaps the screws need to be tightened a bit to seal the O-ring better? From lindaw at snf.stanford.edu Fri Jan 7 11:30:53 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:30:53 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: I verified while cleaning that the screw at 8 O'Clock is definitely leaking air into the chamber. With tape over the top cover hole, I sprayed a few drops of acetone near the outside of the screw, and the acetone was sucked into the chamber immediately. From mahnaz at snf.stanford.edu Fri Jan 7 15:48:31 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 Jan 2011 15:48:31 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Ran wafers they do not look uniform. When applied resist on the center all drifted to the top of the wafer just sitting on the chuck for 3 seconds. I like the exhaust to be checked as well. Kaveh had the same issues with the system. From justinwu at snf.stanford.edu Thu Jan 13 11:21:04 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Thu, 13 Jan 2011 11:21:04 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Spun 2% PMMA at 3000rpm on 4in wafer, no visible fringe effects after spin (uniform color). From gsosa at snf.stanford.edu Thu Jan 13 16:17:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Jan 2011 16:17:24 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Reduced the exhaust to the process area. After exhaust adjustment test wafers looked good. From gsosa at snf.stanford.edu Tue Jan 4 15:50:02 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Jan 2011 15:50:02 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: System was late in shipping from vendor. Expect delivery tomorrow, late AM. Installation and testing to follow. From vilanova at snf.stanford.edu Wed Jan 5 14:38:22 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:22 -0800 Subject: Shutdown laurell-R SNF 2010-12-15 10:43:31: Sending out for PM Message-ID: Installation and Testing Completed, Ok to use. From vilanova at snf.stanford.edu Wed Jan 5 14:38:28 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:38:28 -0800 Subject: Comment laurell-R SNF 2011-01-04 15:50:02: System status 1/4 Message-ID: Installation and Testing Completed, Ok to use. From lindaw at snf.stanford.edu Fri Jan 7 11:16:45 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:16:45 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:16:44: non-uniformity issue Message-ID: I spun some wafers, and even when using the tape over the top cover hole, there seems to be an airflow leak into the chamber during spin. This lead to results that look only slightly better than if the hole remained open during the spin. I ran one wafer while pressing down on the clear cover at the screw at 8 O'Clock and the uniformity was much better. I suspect that there is a leak around the top cover O-ring at this site. Perhaps the screws need to be tightened a bit to seal the O-ring better? From lindaw at snf.stanford.edu Fri Jan 7 11:30:53 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 7 Jan 2011 11:30:53 -0800 Subject: Comment laurell-R SNF 2011-01-07 11:30:52: Leak definitely at the top cover screw at 8O'Clock Message-ID: I verified while cleaning that the screw at 8 O'Clock is definitely leaking air into the chamber. With tape over the top cover hole, I sprayed a few drops of acetone near the outside of the screw, and the acetone was sucked into the chamber immediately. From mahnaz at snf.stanford.edu Fri Jan 7 15:48:31 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 7 Jan 2011 15:48:31 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Ran wafers they do not look uniform. When applied resist on the center all drifted to the top of the wafer just sitting on the chuck for 3 seconds. I like the exhaust to be checked as well. Kaveh had the same issues with the system. From justinwu at snf.stanford.edu Thu Jan 13 11:21:04 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Thu, 13 Jan 2011 11:21:04 -0800 Subject: Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay Message-ID: Spun 2% PMMA at 3000rpm on 4in wafer, no visible fringe effects after spin (uniform color). From gsosa at snf.stanford.edu Thu Jan 13 16:17:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Jan 2011 16:17:24 -0800 Subject: Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat Message-ID: Reduced the exhaust to the process area. After exhaust adjustment test wafers looked good.