Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Jan 7 15:48:31 PST 2011


Ran wafers they do not look uniform.
When applied resist on the center all drifted to the top of the wafer just sitting on the chuck for 3 seconds.
I like the exhaust to be checked as well.
Kaveh had the same issues with the system.




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