Comment laurell-R SNF 2011-01-13 11:21:04: Exhaust seems okay

justinwu at snf.stanford.edu justinwu at snf.stanford.edu
Thu Jan 13 11:21:04 PST 2011


Spun 2% PMMA at 3000rpm on 4in  wafer, no visible fringe effects after spin (uniform color).




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