Problem laurell-R SNF 2011-01-07 15:48:30: system might not be sitting flat

[mahnaz at snf.stanford.edu]

Ran wafers they do not look uniform.
When applied resist on the center all drifted to the top of the wafer just sitting on the chuck for 3 seconds.
I like the exhaust to be checked as well.
Kaveh had the same issues with the system.