From shott at snf.stanford.edu Fri Aug 2 08:29:39 2002 From: shott at snf.stanford.edu (John Shott) Date: Fri, 02 Aug 2002 08:29:39 -0700 Subject: Test of new litho mailing list ... Message-ID: <3D4AA563.8E9B8829@snf.stanford.edu> Litho folks: This is a test of the new "litho at snf" mailing list that will give us "status at a glance" for the litho area ... Thanks, John From rcrane at snf.stanford.edu Fri Aug 2 09:24:38 2002 From: rcrane at snf.stanford.edu (Dick Crane) Date: Fri, 02 Aug 2002 09:24:38 -0700 Subject: [Fwd: equipment status] Message-ID: <3D4AB246.D1A21C34@snf.stanford.edu> Mike Martinez wrote: > > > > >> >> >> Photolithography Equipment Status Report >> >> 8/2/02 >> >> AFM1..................... >> AFM2.....................probe head returned. will seek hector's >> help with initial set up >> BLUE M................. >> DEKTAK CLEAN... >> DEKTAK Au........... >> ELLIPSOMETER.... >> ELP1....................... >> ELP2....................... >> EVALIGN................ >> EVBONDER............ >> LAUREL..................shutdown for cleaning/monthly pm >> HEADWAY2............ >> KARLSUSS..............dangerous condition problem cleared, system >> tested ok. >> LITHOSOLV............ >> MASKSCRUB.......... >> NANO1.................... >> NANO2.................... >> NIKON..................... >> R2T2........................ >> SVGCOAT................ >> SVGCOAT2.............. >> SVGDEV.................. >> SVGDEV2................. >> ULTRATECH........... >> ULTRATECH2......... >> UVCURE.................. >> WBMISCRES........... > > YES OVEN...................... > > >> >> > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Aug 5 08:42:13 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 05 Aug 2002 08:42:13 -0700 Subject: equipment status References: <3CF55532.83F01B0A@snf.stanford.edu> Message-ID: <3D4E9CD4.7251D91F@snf.stanford.edu> > > > Photolithography Equipment Status Report > > 8/5/02 > > AFM1..................... > AFM2.....................original probe head returned. will work with > hector to calibrate and test > BLUE M................. > DEKTAK CLEAN... > DEKTAK Au........... > ELLIPSOMETER.... > ELP1....................... > ELP2....................... > EVALIGN................ > EVBONDER............ > LAUREL.................. > HEADWAY2............ > KARLSUSS.............. > LITHOSOLV............ > MASKSCRUB.......... > NANO1.................... > NANO2.................... > NIKON..................... > R2T2........................ > SVGCOAT................ > SVGCOAT2.............. > SVGDEV.................. > SVGDEV2................. > ULTRATECH...........problem. system shut down at low pressure. looking > into problem. > ULTRATECH2......... > UVCURE.................. > WBMISCRES........... > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Aug 6 08:48:48 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 06 Aug 2002 08:48:48 -0700 Subject: equipment status References: <3CF55532.83F01B0A@snf.stanford.edu> Message-ID: <3D4FEFE0.FBF4FFC2@snf.stanford.edu> > > > Photolithography Equipment Status Report > > 8/6/02 > > AFM1..................... > AFM2.....................original probe head needs to be installed & > loaner sent back > BLUE M................. > DEKTAK CLEAN... > DEKTAK Au........... > ELLIPSOMETER.... > ELP1....................... > ELP2....................... > EVALIGN................ > EVBONDER............ > LAUREL.................. > HEADWAY2............ > KARLSUSS.............. > LITHOSOLV............ > MASKSCRUB.......... > NANO1.................... > NANO2.................... > NIKON..................... > R2T2........................ > SVGCOAT................ > SVGCOAT2.............. > SVGDEV.................. > SVGDEV2................. > ULTRATECH...........problem. system shutdown at low n2 level > ULTRATECH2......... > UVCURE.................. > WBMISCRES........... YESOVEN............... > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Aug 7 08:51:50 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 07 Aug 2002 08:51:50 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D514216.BDEA4974@snf.stanford.edu> > > > Litho Equipment Status Report > 8/7/02 > > AFM1.......................original probe head needs to be installed > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................problem. poor focus on bsa > EV BONDER.............problem. bond fixture flags are still sticking > to wafers > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............problem. system shut off at low n2 > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Aug 8 08:44:34 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 08 Aug 2002 08:44:34 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D5291E1.E5D3796F@snf.stanford.edu> > > > Litho Equipment Status Report > 8-8-02 > > AFM1....................... > AFM2.......................probe head install today > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER.............problem. bond fixture flags sticking > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............low n2 pressure problem > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From eddy97 at yahoo.com Fri Aug 9 08:27:32 2002 From: eddy97 at yahoo.com (Eddy Vilanova) Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT) Subject: equip status (fwd) In-Reply-To: Message-ID: <20020809152732.24915.qmail@web40304.mail.yahoo.com> --- Mario Vilanova wrote: > > > ---------- Forwarded message ---------- > Date: Thu, 08 Aug 2002 09:15:18 -0700 > From: Mike Martinez > To: vilanova at snf.stanford.edu > Subject: equip status > > > > ATTACHMENT part 2 message/rfc822 charset=US-ASCII > Date: Wed, 07 Aug 2002 08:43:05 -0700 > From: Mike Martinez > To: martinez at snf.stanford.edu > Subject: equipment status > > Litho Equipment Status Report > 08/09/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER.............flag sticks to the plate. > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > > __________________________________________________ Do You Yahoo!? HotJobs - Search Thousands of New Jobs http://www.hotjobs.com From martinez at snf.stanford.edu Tue Aug 13 08:41:08 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 13 Aug 2002 08:41:08 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D592893.8F00E0B6@snf.stanford.edu> > > > Litho Equipment Status Report > 8-13-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER.............problem. flags sticking. fixtures wil be > repaired today > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER.............bonder install begins 8/19/02 > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2...............shutdown. dispense motor replacement and > calibration today > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2..........monthly pm today > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Aug 14 08:44:54 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 14 Aug 2002 08:44:54 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D5A7AF5.89AEBDBE@snf.stanford.edu> > > > Litho Equipment Status Report > 8-14-02 > > > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER.............system setup to begin 8-19-02 > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT.................broken wafer in catch cup. cleaned and tested > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From eddy97 at yahoo.com Fri Aug 16 08:30:52 2002 From: eddy97 at yahoo.com (Eddy Vilanova) Date: Fri, 16 Aug 2002 08:30:52 -0700 (PDT) Subject: equip status In-Reply-To: Message-ID: <20020816153052.29590.qmail@web40312.mail.yahoo.com> Mario Vilanova wrote: ---------- Forwarded message ---------- Date: Thu, 08 Aug 2002 09:15:18 -0700 From: Mike Martinez To: vilanova at snf.stanford.edu Subject: equip status > ATTACHMENT part 2 message/rfc822 charset=US-ASCII Date: Wed, 07 Aug 2002 08:43:05 -0700 From: Mike Martinez To: martinez at snf.stanford.edu Subject: equipment status Litho Equipment Status Report 08/16/02 AFM1....................... AFM2....................... BLUE M................... DEKTAK CLEAN.... DEKTAK Au............ ELLIPSOMETER..... ELP1......................... ELP2......................... EV ALIGN................ EV BONDER............. LAUREL................... HEADWAY2............. KARLSUSS............... KARLSUSS2............. KS BONDER............. LITHOSOLV............. MASKSCRUB........... NANO1...................... NANO2...................... NIKON...................... R2T2.......................... SVGCOAT................. SVGCOAT2............... SVGDEV.................... SVGDEV2.................. ULTRATECH............ ULTRATECH2.......... UVCURE................... WBMISCRES............ YES OVEN................ ZYGO........................ --------------------------------- Do You Yahoo!? HotJobs, a Yahoo! service - Search Thousands of New Jobs -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Aug 19 08:46:40 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 19 Aug 2002 08:46:40 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D6112E0.5235B62F@snf.stanford.edu> > > > Litho Equipment Status Report > 8-19-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER.............system setup today > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON......................shutdown. wafer loading problem > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Aug 20 08:35:10 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 20 Aug 2002 08:35:10 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D6261AE.D1505CD1@snf.stanford.edu> > > > Litho Equipment Status Report > 8-20-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER.............system setup moved to Wed. Aug 21st > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON......................shutdown in coral but no explaination of > problem > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Aug 21 08:41:31 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 21 Aug 2002 08:41:31 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D63B4AB.5217881A@snf.stanford.edu> > > > Litho Equipment Status Report > 8-21-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER.............system setup today > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2..................unable to clear problem in coral. track is > working > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Aug 22 08:29:22 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 22 Aug 2002 08:29:22 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D650352.AF8DB97A@snf.stanford.edu> > > > Litho Equipment Status Report > 8-21-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER.............system setup continues > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT.................shutdown. dispense arm problem > SVGCOAT2............... > SVGDEV.................... > SVGDEV2..................unable to clear yellow light. > ULTRATECH............problem. xy stage servo error > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Aug 23 08:25:23 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 23 Aug 2002 08:25:23 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D6653E2.E2A40C72@snf.stanford.edu> > > > Litho Equipment Status Report > 8-23-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2.............problem. chuck doesn't spin > KARLSUSS............... > KARLSUSS2............. > KS BONDER.............chamber not reaching hi vac > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Aug 26 08:32:06 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 26 Aug 2002 08:32:06 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D6A49F6.FE04BEB4@snf.stanford.edu> > > > Litho Equipment Status Report > 8-26-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. poor resolution > KARLSUSS2.............in qual > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................shutdown. yet another melted cassette > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Aug 27 08:35:25 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 27 Aug 2002 08:35:25 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D6B9C3D.AE5B3F74@snf.stanford.edu> > > > Litho Equipment Status Report > 8-27-02 > > > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2.............system qual continues today > KS BONDER.............qual on hold for new pump > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................shutdown. 2nd cleaning completed. needs to be > programmed > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Aug 28 08:38:49 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 28 Aug 2002 08:38:49 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D6CEE89.29BAE8BD@snf.stanford.edu> > > > Litho Equipment Status Report > 8-28-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2.............interlock install today > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2...............shutdown. broken wafer in catch cup. damaged > ebr nozzle > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Aug 29 08:31:45 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 29 Aug 2002 08:31:45 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D6E3E61.E6DCF669@snf.stanford.edu> > > > Litho Equipment Status Report > 8-29-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2.............system qual & interlock install > KS BONDER.............qual on hold for vac pump > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2...............shutdown. inconsistant dispense arm movement > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: