[Fwd: equipment status]

Dick Crane rcrane at snf.stanford.edu
Fri Aug 2 09:24:38 PDT 2002



Mike Martinez wrote:

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>>               Photolithography Equipment Status Report
>>
>>                                 8/2/02
>>
>> AFM1.....................
>> AFM2.....................probe head returned. will seek hector's
>> help with initial set up
>> BLUE M.................
>> DEKTAK CLEAN...
>> DEKTAK Au...........
>> ELLIPSOMETER....
>> ELP1.......................
>> ELP2.......................
>> EVALIGN................
>> EVBONDER............
>> LAUREL..................shutdown for cleaning/monthly pm
>> HEADWAY2............
>> KARLSUSS..............dangerous condition problem cleared, system
>> tested ok.
>> LITHOSOLV............
>> MASKSCRUB..........
>> NANO1....................
>> NANO2....................
>> NIKON.....................
>> R2T2........................
>> SVGCOAT................
>> SVGCOAT2..............
>> SVGDEV..................
>> SVGDEV2.................
>> ULTRATECH...........
>> ULTRATECH2.........
>> UVCURE..................
>> WBMISCRES...........
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>    YES OVEN......................
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