equipment status

Mike Martinez martinez at snf.stanford.edu
Tue Aug 6 08:48:48 PDT 2002





>
>
>               Photolithography Equipment Status Report
>
>                                 8/6/02
>
> AFM1.....................
> AFM2.....................original probe head needs to be installed &
> loaner sent back
> BLUE M.................
> DEKTAK CLEAN...
> DEKTAK Au...........
> ELLIPSOMETER....
> ELP1.......................
> ELP2.......................
> EVALIGN................
> EVBONDER............
> LAUREL..................
> HEADWAY2............
> KARLSUSS..............
> LITHOSOLV............
> MASKSCRUB..........
> NANO1....................
> NANO2....................
> NIKON.....................
> R2T2........................
> SVGCOAT................
> SVGCOAT2..............
> SVGDEV..................
> SVGDEV2.................
> ULTRATECH...........problem. system shutdown at low n2 level
> ULTRATECH2.........
> UVCURE..................
> WBMISCRES...........

    YESOVEN...............


>

>
>
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