equipment status

Mike Martinez martinez at snf.stanford.edu
Wed Aug 7 08:51:50 PDT 2002





>
>
>                     Litho Equipment Status Report
>                                 8/7/02
>
> AFM1.......................original probe head needs to be installed
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................problem. poor focus on bsa
> EV BONDER.............problem. bond fixture flags are still sticking
> to wafers
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............problem. system shut off at low n2
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
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