equip status

[Eddy Vilanova]

 Mario Vilanova wrote:

---------- Forwarded message ----------
Date: Thu, 08 Aug 2002 09:15:18 -0700
From: Mike Martinez 
To: vilanova at snf.stanford.edu
Subject: equip status


> ATTACHMENT part 2 message/rfc822 charset=US-ASCII Date: Wed, 07 Aug 2002 08:43:05 -0700
From: Mike Martinez 
To: martinez at snf.stanford.edu
Subject: equipment status

Litho Equipment Status Report 
08/16/02
AFM1....................... 
AFM2....................... 
BLUE M................... 
DEKTAK CLEAN.... 
DEKTAK Au............ 
ELLIPSOMETER..... 
ELP1......................... 
ELP2......................... 
EV ALIGN................ 
EV BONDER............. 
LAUREL................... 
HEADWAY2............. 
KARLSUSS............... 
KARLSUSS2............. 
KS BONDER............. 
LITHOSOLV............. 
MASKSCRUB........... 
NANO1...................... 
NANO2...................... 
NIKON...................... 
R2T2.......................... 
SVGCOAT................. 
SVGCOAT2............... 
SVGDEV.................... 
SVGDEV2.................. 
ULTRATECH............ 
ULTRATECH2.......... 
UVCURE................... 
WBMISCRES............ 
YES OVEN................ 
ZYGO........................ 
  



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