equipment status

Mike Martinez martinez at snf.stanford.edu
Tue Aug 27 08:35:25 PDT 2002





>
>
>                     Litho Equipment Status Report
>                                8-27-02
>
>
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown. parts
> KARLSUSS2.............system qual continues today
> KS BONDER.............qual on hold for new pump
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................shutdown. 2nd cleaning completed. needs to be
> programmed
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20020827/b1d75ffd/attachment.html>


More information about the litho mailing list