equipment status

Mike Martinez martinez at snf.stanford.edu
Thu Aug 29 08:31:45 PDT 2002





>
>
>                     Litho Equipment Status Report
>                                8-29-02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown. parts
> KARLSUSS2.............system qual & interlock install
> KS BONDER.............qual on hold for vac pump
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............shutdown. inconsistant dispense arm movement
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
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