From martinez at snf.stanford.edu Mon Dec 2 08:44:50 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 02 Dec 2002 08:44:50 -0800 Subject: litho a.m. report 12/2/02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3DEB8E02.BD19083E@snf.stanford.edu> > > > Litho Equipment Status Report > 12/2/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................problem. poor resolution @ 1.5um > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT.................contamination on hot plate. possible shutdown > today > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Dec 3 08:26:57 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 03 Dec 2002 08:26:57 -0800 Subject: litho a.m. report 12-3-02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3DECDB51.8E0B3BD6@snf.stanford.edu> > > > Litho Equipment Status Report > 12/3/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................poor resolution on 1.5um features > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Dec 4 08:39:01 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 04 Dec 2002 08:39:01 -0800 Subject: litho a.m. report 12/4/02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3DEE2FA4.D4F371E1@snf.stanford.edu> > > > Litho Equipment Status Report > 12/4/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................poor resolution @ 1.5um > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Dec 5 08:35:02 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 05 Dec 2002 08:35:02 -0800 Subject: litho a.m. report 12/5/02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3DEF8036.E1C827AC@snf.stanford.edu> > > > Litho Equipment Status Report > 12/5/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Dec 6 08:28:49 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 06 Dec 2002 08:28:49 -0800 Subject: I love the smell of litho in the morning...12/6/02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3DF0D040.1D9BE6E0@snf.stanford.edu> > > > Litho Equipment Status Report > 12/6/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2.............problem. unauthorized changes to CI1 intensity > level. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Dec 9 09:40:48 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 09 Dec 2002 09:40:48 -0800 Subject: [Fwd: litho a.m. report 12/9/02] Message-ID: <3DF4D5A0.6D97C594@snf.stanford.edu> -------------- next part -------------- An embedded message was scrubbed... From: Mike Martinez Subject: litho a.m. report 12/9/02 Date: Mon, 09 Dec 2002 08:31:04 -0800 Size: 4025 URL: From martinez at snf.stanford.edu Tue Dec 10 08:53:10 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 10 Dec 2002 08:53:10 -0800 Subject: litho a.m. report 12/10/02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3DF61BF5.833DE523@snf.stanford.edu> > > > Litho Equipment Status Report > 12/10/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON......................problem. mask loading > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2..................problem. send indexer not working > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Dec 11 08:26:56 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 11 Dec 2002 08:26:56 -0800 Subject: litho a.m. report 12/11/02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3DF76750.726883B@snf.stanford.edu> > > > Litho Equipment Status Report > 12/11/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2.............shutdown. micrometer problem > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Thu Dec 12 08:50:24 2002 From: vilanova at snf.stanford.edu (Mario Vilanova) Date: Thu, 12 Dec 2002 08:50:24 -0800 (PST) Subject: LITHO A.M. REPORT 12/12/02 Message-ID: > > Litho Equipment Status Report > 12/12/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER.............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............SHUTDOWN > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > > __________________________________________________ Do You Yahoo!? HotJobs - Search Thousands of New Jobs http://www.hotjobs.com From vilanova at snf.stanford.edu Mon Dec 16 09:06:21 2002 From: vilanova at snf.stanford.edu (Mario Vilanova) Date: Mon, 16 Dec 2002 09:06:21 -0800 (PST) Subject: equip status (fwd) Message-ID: LITHO AM Daily Report 12/16/02 ---------- Forwarded message ---------- Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT) From: Eddy Vilanova To: litho at snf.stanford.edu, rcrane at snf.stanford.edu Cc: vilanova at snf.stanford.edu Subject: Re: equip status (fwd) > > Litho Equipment Status Report > 12/16/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ somebody shtudown the lamp, need to replace it. > EV BONDER.............. > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. mask vacuum problem > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ Shutter Problem. > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > > __________________________________________________ Do You Yahoo!? HotJobs - Search Thousands of New Jobs http://www.hotjobs.com From martinez at snf.stanford.edu Tue Dec 17 08:36:13 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 17 Dec 2002 08:36:13 -0800 Subject: litho a.m. report 12/17/02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3DFF527D.C8C4E2A4@snf.stanford.edu> > > > Litho Equipment Status Report > 12/17/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2.............shutdown. wec over current > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2..................problem. indexer double stacking > ULTRATECH............problem. high lamp variation > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Dec 18 08:34:07 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 18 Dec 2002 08:34:07 -0800 Subject: litho a.m. report 12-18-02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E00A37E.28A607FD@snf.stanford.edu> > > > Litho Equipment Status Report > 12/18/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............problem. lamp intensity > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Dec 19 08:48:54 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 19 Dec 2002 08:48:54 -0800 Subject: litho a.m. report 12/19/02 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E01F876.1893EC82@snf.stanford.edu> > > > Litho Equipment Status Report > 12/19/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... 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