LITHO A.M. REPORT 12/12/02

Mario Vilanova vilanova at snf.stanford.edu
Thu Dec 12 08:50:24 PST 2002


> 
>                      Litho Equipment Status Report
>                                 12/12/02
> 
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER..............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............SHUTDOWN
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


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