equip status (fwd)

[Mario Vilanova]

LITHO AM Daily Report 12/16/02

---------- Forwarded message ----------
Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT)
From: Eddy Vilanova <eddy97 at yahoo.com>
To: litho at snf.stanford.edu, rcrane at snf.stanford.edu
Cc: vilanova at snf.stanford.edu
Subject: Re: equip status (fwd)


> 
>                      Litho Equipment Status Report
>                                 12/16/02
> 
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................ somebody shtudown the lamp, need to replace it.
> EV BONDER..............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............
> KARLSUSS2............. mask vacuum problem
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............ Shutter Problem.
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


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