Litho AM Report 11/15/02

Mario Vilanova vilanova at snf.stanford.edu
Fri Nov 15 08:29:54 PST 2002


							
>                      Litho Equipment Status Report
>                                 11/15/02
> 
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP MODE 10MW/CM2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............SHUTDOWN
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................SHUTDOWN - RETICLE LOADING  PROBLEM.
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


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