From vilanova at snf.stanford.edu  Tue Oct  1 08:43:49 2002
From: vilanova at snf.stanford.edu (Mario Vilanova)
Date: Tue, 1 Oct 2002 08:43:49 -0700 (PDT)
Subject: equip status (fwd)
Message-ID: <Pine.LNX.4.04.10210010842150.24808-100000@snf.stanford.edu>



---------- Forwarded message ----------
Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT)
From: Eddy Vilanova <eddy97 at yahoo.com>
To: litho at snf.stanford.edu, rcrane at snf.stanford.edu
Cc: vilanova at snf.stanford.edu
Subject: Re: equip status (fwd)


--- Mario Vilanova <vilanova at snf.stanford.edu> wrote:
> 
> 
> ---------- Forwarded message ----------
> Date: Thu, 08 Aug 2002 09:15:18 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: vilanova at snf.stanford.edu
> Subject: equip status
> 
> 
> 

> ATTACHMENT part 2 message/rfc822 charset=US-ASCII
> Date: Wed, 07 Aug 2002 08:43:05 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: martinez at snf.stanford.edu
> Subject: equipment status
> 
>                      Litho Equipment Status Report
>                                 10/01/02
> 
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER..............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............SHUTDOWN
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............SERVO PROBLEM.
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


__________________________________________________
Do You Yahoo!?
HotJobs - Search Thousands of New Jobs
http://www.hotjobs.com



From martinez at snf.stanford.edu  Wed Oct  2 08:52:43 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Wed, 02 Oct 2002 08:52:43 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3D9B164B.1956FD7E@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10-2-02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER.............
> LAUREL...................shutdown. monthly P.M.
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021002/9977493c/attachment.html>

From vilanova at snf.stanford.edu  Thu Oct  3 08:23:43 2002
From: vilanova at snf.stanford.edu (Mario Vilanova)
Date: Thu, 3 Oct 2002 08:23:43 -0700 (PDT)
Subject: equip status (fwd)
Message-ID: <Pine.LNX.4.04.10210030822320.31651-100000@snf.stanford.edu>



---------- Forwarded message ----------
Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT)
From: Eddy Vilanova <eddy97 at yahoo.com>
To: litho at snf.stanford.edu, rcrane at snf.stanford.edu
Cc: vilanova at snf.stanford.edu
Subject: Re: equip status (fwd)


--- Mario Vilanova <vilanova at snf.stanford.edu> wrote:
> 
> 
> ---------- Forwarded message ----------
> Date: Thu, 08 Aug 2002 09:15:18 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: vilanova at snf.stanford.edu
> Subject: equip status
> 
> 
> 

> ATTACHMENT part 2 message/rfc822 charset=US-ASCII
> Date: Wed, 07 Aug 2002 08:43:05 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: martinez at snf.stanford.edu
> Subject: equipment status
> 
>                      Litho Equipment Status Report
>                                 10/03/02
> 
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............SHUTDOWN
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


__________________________________________________
Do You Yahoo!?
HotJobs - Search Thousands of New Jobs
http://www.hotjobs.com



From vilanova at snf.stanford.edu  Fri Oct  4 08:26:13 2002
From: vilanova at snf.stanford.edu (Mario Vilanova)
Date: Fri, 4 Oct 2002 08:26:13 -0700 (PDT)
Subject: equip status (fwd)
Message-ID: <Pine.LNX.4.04.10210040824040.27295-100000@snf.stanford.edu>



---------- Forwarded message ----------
Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT)
From: Eddy Vilanova <eddy97 at yahoo.com>
To: litho at snf.stanford.edu, rcrane at snf.stanford.edu
Cc: vilanova at snf.stanford.edu
Subject: Re: equip status (fwd)


--- Mario Vilanova <vilanova at snf.stanford.edu> wrote:
> 
> 
> ---------- Forwarded message ----------
> Date: Thu, 08 Aug 2002 09:15:18 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: vilanova at snf.stanford.edu
> Subject: equip status
> 
> 
> 

> ATTACHMENT part 2 message/rfc822 charset=US-ASCII
> Date: Wed, 07 Aug 2002 08:43:05 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: martinez at snf.stanford.edu
> Subject: equipment status
> 
>                      Litho Equipment Status Report
>                                 10/04/02
> 
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............SHUTDOWN
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


__________________________________________________
Do You Yahoo!?
HotJobs - Search Thousands of New Jobs
http://www.hotjobs.com



From vilanova at snf.stanford.edu  Mon Oct  7 10:25:25 2002
From: vilanova at snf.stanford.edu (Mario Vilanova)
Date: Mon, 7 Oct 2002 10:25:25 -0700 (PDT)
Subject: equip status (fwd)
Message-ID: <Pine.LNX.4.04.10210071024110.30333-100000@snf.stanford.edu>



---------- Forwarded message ----------
Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT)
From: Eddy Vilanova <eddy97 at yahoo.com>
To: litho at snf.stanford.edu, rcrane at snf.stanford.edu
Cc: vilanova at snf.stanford.edu
Subject: Re: equip status (fwd)


--- Mario Vilanova <vilanova at snf.stanford.edu> wrote:
> 
> 
> ---------- Forwarded message ----------
> Date: Thu, 08 Aug 2002 09:15:18 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: vilanova at snf.stanford.edu
> Subject: equip status
> 
> 
> 

> ATTACHMENT part 2 message/rfc822 charset=US-ASCII
> Date: Wed, 07 Aug 2002 08:43:05 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: martinez at snf.stanford.edu
> Subject: equipment status
> 
>                      Litho Equipment Status Report
>                                 10/07/02
> 
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER..............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


__________________________________________________
Do You Yahoo!?
HotJobs - Search Thousands of New Jobs
http://www.hotjobs.com



From martinez at snf.stanford.edu  Wed Oct  9 08:44:00 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Wed, 09 Oct 2002 08:44:00 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DA44EBF.2CB4D3C3@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/9/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............problem. alignment problems
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021009/524fc7a2/attachment.html>

From martinez at snf.stanford.edu  Thu Oct 10 09:00:11 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Thu, 10 Oct 2002 09:00:11 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DA5A40B.9D403B52@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/10/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................lamp set to CP mode. 9mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021010/b772b812/attachment.html>

From martinez at snf.stanford.edu  Fri Oct 11 08:18:51 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Fri, 11 Oct 2002 08:18:51 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DA6EBDB.84BC5783@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/11/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................lamp calibrated in CP mode. 9mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021011/89b8414d/attachment.html>

From martinez at snf.stanford.edu  Mon Oct 14 08:34:33 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Mon, 14 Oct 2002 08:34:33 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DAAE409.B197865@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                11/14/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................lamp power supply is in CP mode. intensity =
> 9mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021014/a272974f/attachment.html>

From martinez at snf.stanford.edu  Tue Oct 15 08:35:09 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Tue, 15 Oct 2002 08:35:09 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DAC35AD.27A8D30C@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/15/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode. 9mw/cm2 intensity
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021015/c3026e91/attachment.html>

From martinez at snf.stanford.edu  Wed Oct 16 08:42:53 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Wed, 16 Oct 2002 08:42:53 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DAD88FD.7963DFF8@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/16/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................constant power mode. 9mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021016/2e9100ed/attachment.html>

From martinez at snf.stanford.edu  Thu Oct 17 08:29:04 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Thu, 17 Oct 2002 08:29:04 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DAED73F.6CFCB85@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/17/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode. 9mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............problem. x-y servo error
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021017/bead1339/attachment.html>

From vilanova at snf.stanford.edu  Fri Oct 18 09:51:44 2002
From: vilanova at snf.stanford.edu (Mario Vilanova)
Date: Fri, 18 Oct 2002 09:51:44 -0700 (PDT)
Subject: equip status (fwd)
Message-ID: <Pine.LNX.4.04.10210180950450.14168-100000@snf.stanford.edu>



---------- Forwarded message ----------
Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT)
From: Eddy Vilanova <eddy97 at yahoo.com>
To: litho at snf.stanford.edu, rcrane at snf.stanford.edu
Cc: vilanova at snf.stanford.edu
Subject: Re: equip status (fwd)


--- Mario Vilanova <vilanova at snf.stanford.edu> wrote:
> 
> 
> ---------- Forwarded message ----------
> Date: Thu, 08 Aug 2002 09:15:18 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: vilanova at snf.stanford.edu
> Subject: equip status
> 
> 
> 

> ATTACHMENT part 2 message/rfc822 charset=US-ASCII
> Date: Wed, 07 Aug 2002 08:43:05 -0700
> From: Mike Martinez <martinez at snf.stanford.edu>
> To: martinez at snf.stanford.edu
> Subject: equipment status
> 
>                      Litho Equipment Status Report
>                                 10/18/02
> 
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER..............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............SHUTDOWN
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


__________________________________________________
Do You Yahoo!?
HotJobs - Search Thousands of New Jobs
http://www.hotjobs.com



From martinez at snf.stanford.edu  Mon Oct 21 08:33:17 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Mon, 21 Oct 2002 08:33:17 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DB41E3D.EFB45949@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                11/21/02
>
> AFM1.......................
> AFM2.......................problem. no laser signal
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode. 10mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021021/f2455d63/attachment.html>

From martinez at snf.stanford.edu  Tue Oct 22 08:34:15 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Tue, 22 Oct 2002 08:34:15 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DB56FF7.EF195F06@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/22/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode. 10mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................problem. wafer transfer
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021022/04101eaa/attachment.html>

From martinez at snf.stanford.edu  Wed Oct 23 08:37:57 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Wed, 23 Oct 2002 08:37:57 -0700
Subject: equipment status
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DB6C255.F7B5350E@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/23/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode 10mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021023/814faef1/attachment.html>

From martinez at snf.stanford.edu  Thu Oct 24 08:26:31 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Thu, 24 Oct 2002 08:26:31 -0700
Subject: morning litho equipment report oct. 24 2002
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DB81127.C8BD17A9@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/24/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode. intensity = 10mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021024/3ab87ea0/attachment.html>

From martinez at snf.stanford.edu  Fri Oct 25 08:52:29 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Fri, 25 Oct 2002 08:52:29 -0700
Subject: morning litho equip report oct 25 2002
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DB968BC.AC4AFA04@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/25/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode. 10mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021025/0c82ef15/attachment.html>

From martinez at snf.stanford.edu  Mon Oct 28 08:39:28 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Mon, 28 Oct 2002 08:39:28 -0800
Subject: morning equip. report oct. 28 2002
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DBD6840.41985D@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/28/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode 10mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................problem. vac leak
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021028/dffdea34/attachment.html>

From martinez at snf.stanford.edu  Tue Oct 29 08:27:53 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Tue, 29 Oct 2002 08:27:53 -0800
Subject: litho a.m. report 0ct. 29 2002
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DBEB709.525258FC@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/29/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................constant power 10mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021029/1e7dc2ce/attachment.html>

From martinez at snf.stanford.edu  Wed Oct 30 08:41:13 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Wed, 30 Oct 2002 08:41:13 -0800
Subject: litho a.m. report
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DC00BA9.210922FE@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/30/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode 10mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021030/491ee2d7/attachment.html>

From martinez at snf.stanford.edu  Thu Oct 31 08:13:50 2002
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Thu, 31 Oct 2002 08:13:50 -0800
Subject: litho a.m. report
References: <3D514009.D98B3289@snf.stanford.edu>
Message-ID: <3DC156BD.424AB4E2@snf.stanford.edu>





>
>
>                     Litho Equipment Status Report
>                                10/31/02
>
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................CP mode. 10mw/cm2
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............shutdown
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20021031/7dc96d6b/attachment.html>