From martinez at snf.stanford.edu Tue Sep 3 08:54:24 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 03 Sep 2002 08:54:24 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D74DB2F.92A34D67@snf.stanford.edu> > > > Litho Equipment Status Report > 9-3-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2.............interlock in place. waiting for coral assignment > > KS BONDER.............waiting for vac pump > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Sep 4 08:40:34 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 04 Sep 2002 08:40:34 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D762972.3F857F52@snf.stanford.edu> > > > Litho Equipment Status Report > 8-4-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2.............will send message when system is ready for use > KS BONDER.............qual on hold for vac pump > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2..................yellow light in coral but no problem here > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Sep 5 08:40:19 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 05 Sep 2002 08:40:19 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D777AE3.B7F0FD1F@snf.stanford.edu> > > > Litho Equipment Status Report > 8-5-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2............. > KS BONDER.............F/S to continue qual. 9/12 > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Sep 6 08:31:01 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 06 Sep 2002 08:31:01 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D78CA35.CD62A5A0@snf.stanford.edu> > > > Litho Equipment Status Report > 8-6-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2............. > KS BONDER.............system qual today > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Sep 9 08:50:15 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 09 Sep 2002 08:50:15 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D7CC336.5FFEC7EE@snf.stanford.edu> > > > Litho Equipment Status Report > 9-9-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2............. > KS BONDER.............chamber clean > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV....................problem. indexer not sensing wafers > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Sep 10 08:36:39 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 10 Sep 2002 08:36:39 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D7E1187.A09D6E60@snf.stanford.edu> > > > Litho Equipment Status Report > 9-10-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2............. > KS BONDER.............chamber decontamination continues > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT.................problem. excessive resist on hot plate. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Sep 11 08:44:59 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 11 Sep 2002 08:44:59 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D7F64FA.E90FA512@snf.stanford.edu> > > > Litho Equipment Status Report > 9-11-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2............. > KS BONDER.............almost ready for testing > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Sep 12 08:41:39 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 12 Sep 2002 08:41:39 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D80B5B3.CBF7D576@snf.stanford.edu> > > > Litho Equipment Status Report > 9-12-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown.parts > KARLSUSS2............. > KS BONDER.............ready for testing > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT.................weekly pm > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Sep 13 08:44:19 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 13 Sep 2002 08:44:19 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D8207D3.5051EF63@snf.stanford.edu> > > > Litho Equipment Status Report > 9-13-02 > > green lights on all tools except for the karl suss MA6 > > which is going to be hauled out of here and converted > > AFM1....................... into a > mini cooper > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Sep 16 08:34:30 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 16 Sep 2002 08:34:30 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D85FA06.67A322A0@snf.stanford.edu> > > > Litho Equipment Status Report > 9-16-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON......................problem. wafer handling error > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............problem. xy stage problem > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Sep 17 08:36:15 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 17 Sep 2002 08:36:15 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D874BEF.B9E66A13@snf.stanford.edu> > > > Litho Equipment Status Report > 9-17-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2.............shutdown. ellipsoidal mirror > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Sep 18 08:47:21 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 18 Sep 2002 08:47:21 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D88A009.CC19D8D7@snf.stanford.edu> > > > Litho Equipment Status Report > 9/18/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. parts > KARLSUSS2.............shutdown. ellipsoidal mirror > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Sep 19 08:43:55 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 19 Sep 2002 08:43:55 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D89F0BA.BCA4159F@snf.stanford.edu> > > > Litho Equipment Status Report > 9-19-02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Sep 20 08:39:54 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 20 Sep 2002 08:39:54 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D8B414A.F201EA07@snf.stanford.edu> > > > Litho Equipment Status Report > 9/20/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Sep 23 08:36:28 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 23 Sep 2002 08:36:28 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D8F34FC.AEC9B402@snf.stanford.edu> > > > Litho Equipment Status Report > 9/23/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............problem. servo disable > ULTRATECH2..........problem. A/D out of range > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Sep 24 08:33:16 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 24 Sep 2002 08:33:16 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D9085BC.8FC3F0D5@snf.stanford.edu> > > > Litho Equipment Status Report > 9/24/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............problem. servo problem > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Sep 25 08:37:15 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 25 Sep 2002 08:37:15 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D91D82B.A7042C9@snf.stanford.edu> > > > Litho Equipment Status Report > 9/25/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................shutdown. unable to calibrate lamp power > supply > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Sep 26 08:41:23 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 26 Sep 2002 08:41:23 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D932AA3.6F758DB@snf.stanford.edu> > > > Litho Equipment Status Report > 9/26/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2.............problem. over current > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV....................problem. purge error > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Sep 27 08:05:04 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 27 Sep 2002 08:05:04 -0700 Subject: equipment status References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3D9473A0.66FA975E@snf.stanford.edu> > > > Litho Equipment Status Report > 9/27/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Mon Sep 30 10:05:07 2002 From: vilanova at snf.stanford.edu (Mario Vilanova) Date: Mon, 30 Sep 2002 10:05:07 -0700 (PDT) Subject: equip status (fwd) Message-ID: ---------- Forwarded message ---------- Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT) From: Eddy Vilanova To: litho at snf.stanford.edu, rcrane at snf.stanford.edu Cc: vilanova at snf.stanford.edu Subject: Re: equip status (fwd) --- Mario Vilanova wrote: > > > ---------- Forwarded message ---------- > Date: Thu, 08 Aug 2002 09:15:18 -0700 > From: Mike Martinez > To: vilanova at snf.stanford.edu > Subject: equip status > > > > ATTACHMENT part 2 message/rfc822 charset=US-ASCII > Date: Wed, 07 Aug 2002 08:43:05 -0700 > From: Mike Martinez > To: martinez at snf.stanford.edu > Subject: equipment status > > Litho Equipment Status Report > 10/01/02 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > > __________________________________________________ Do You Yahoo!? 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